公开(公告)号：EP1099930A3

公开(公告)日：2004-01-07

申请号：EP00309009.9

申请日：2000-10-13

申请人： ALPS ELECTRIC CO., LTD. ,  ESASHI, Masayoshi

发明人： Abe, Munemitsu, c/o Alps Electric Co., Ltd. ,  Shinohara, Eiji, c/o Alps Electric Co., Ltd. ,  Esashi, Masayoshi

IPC分类号： G01C19/56 ,  G01P9/04

CPC分类号： G01C19/5628 ,  G01C19/5621

摘要： A gyroscope of the present invention includes a tuning fork having three legs and a support portion, an upper glass substrate and a lower glass substrate, between which the tuning fork is interposed, driving electrodes respectively arranged on the two glass substrates so that the driving electrodes are opposed to a base portion of each leg, six movable protruded detection electrodes formed on each of the top surface of and the underside of an end portion of each leg, and six stationary detection electrodes on each of the upper and lower glass substrates so that the six stationary detection electrodes are respectively opposed to the six movable detection electrodes. The gyroscope of the present invention thus features compact design, high sensitivity, and low required driving voltage.

公开(公告)号：EP1118836A3

公开(公告)日：2004-12-08

申请号：EP00310972.5

申请日：2000-12-08

申请人： ALPS ELECTRIC CO., LTD. ,  ESASHI, Masayoshi

发明人： Abe, Munemitsu, c/o Alps Electric Co., Ltd. ,  Shinohara, Eiji, c/o Alps Electric Co., Ltd. ,  Esashi, Masayoshi

IPC分类号： G01C19/56

CPC分类号： B81B7/007 ,  B81C2203/031 ,  G01C19/5621 ,  G01C19/5628

摘要： The invention provides a capacitive micro sensor that suppresses electric noises generated around the electrodes and enhances the S/N ratio to thereby enhance the detection sensitivity. The gyroscope of the invention includes a tuning fork (6) having three legs (9), driving electrodes (4) and detecting electrodes (5) provided on two glass substrates (2, 3), driving fields-through (7) that supply the driving electrodes with a drive signal, and detecting fields-through (8) that extract a detecting signal from the detecting electrodes. There is also provided a shield member between the detecting and the driving, shield members between the detecting and the detecting, and shield members between the driving and the driving are provided, which makes electrostatic shielding between the adjacent fields-through of the areas where the driving fields-through and the detecting fields-through are arrayed.

摘要翻译： 本发明提供一种电容式微型传感器，其抑制电极周围产生的电噪声并提高S / N比，从而提高检测灵敏度。 本发明的陀螺仪包括具有三个支腿（9），设置在两个玻璃基板（2,3）上的驱动电极（4）和检测电极（5））的音叉（6），驱动通过（7） 具有驱动信号的驱动电极，以及检测从检测电极提取检测信号的通过（8）。 还提供了检测和驱动之间的屏蔽构件，检测和检测之间的屏蔽构件，以及驱动和驱动之间的屏蔽构件，这使得在相邻区域之间的静电屏蔽 驱动场通和检测场通过排列。