发明公开
EP1130379A4 OPTICAL CANTILEVER AND PRODUCTION METHOD THEREFOR
有权
OPTISCHER HEBEL UND HERSTELLUNGSVERFAHRENFÜRDENSELBEN
- 专利标题: OPTICAL CANTILEVER AND PRODUCTION METHOD THEREFOR
- 专利标题(中): OPTISCHER HEBEL UND HERSTELLUNGSVERFAHRENFÜRDENSELBEN
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申请号: EP99951218申请日: 1999-11-02
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公开(公告)号: EP1130379A4公开(公告)日: 2002-03-06
- 发明人: NIWA TAKASHI , ICHIHARA SUSUMU , MITSUOKA YASUYUKI , KATO KENJI , CHIBA NORIO , OUMI MANABU , KASAMA NOBUYUKI
- 申请人: SEIKO INSTR INC
- 专利权人: SEIKO INSTR INC
- 当前专利权人: SEIKO INSTR INC
- 优先权: JP32076898 1998-11-11
- 主分类号: G01B21/30
- IPC分类号: G01B21/30 ; G01N37/00 ; G01Q20/02 ; G01Q60/18 ; G01Q60/22 ; G01Q60/38 ; G01Q70/16 ; G01N13/14 ; G01N13/16 ; G12B21/06 ; G12B21/08
摘要:
An optical cantilever for SNOM which emits and/or detects light through a fine aperture, is excellent in mass-productivity and uniformity and permits a fast observation without damaging even a soft sample, characterized by comprising a base (1), a cantilever (2) extending from the base (1), an optical propagation unit (5) and an optical propagation tip (3) of a dielectric penetrating the cantilever (2) and formed so as to protrude beyond the side opposite to the base of the cantilever with its tip end sharpened, a light shielding film (6) covering around the tip-sharpened dielectric, and a fine aperture (4) formed at the tip end of the dielectric.
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