发明公开
EP1130379A4 OPTICAL CANTILEVER AND PRODUCTION METHOD THEREFOR 有权
OPTISCHER HEBEL UND HERSTELLUNGSVERFAHRENFÜRDENSELBEN

OPTICAL CANTILEVER AND PRODUCTION METHOD THEREFOR
摘要:
An optical cantilever for SNOM which emits and/or detects light through a fine aperture, is excellent in mass-productivity and uniformity and permits a fast observation without damaging even a soft sample, characterized by comprising a base (1), a cantilever (2) extending from the base (1), an optical propagation unit (5) and an optical propagation tip (3) of a dielectric penetrating the cantilever (2) and formed so as to protrude beyond the side opposite to the base of the cantilever with its tip end sharpened, a light shielding film (6) covering around the tip-sharpened dielectric, and a fine aperture (4) formed at the tip end of the dielectric.
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