发明授权
- 专利标题: A diamond grid cmp pad dresser
- 专利标题(中): 梳妆台菱形网格的化学机械研磨垫
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申请号: EP00204331.3申请日: 2000-12-04
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公开(公告)号: EP1151825B1公开(公告)日: 2006-06-28
- 发明人: Lin, Frank S. , Sung, Chien-Min
- 申请人: Kinik Company
- 申请人地址: No. 10, Yenping South Road Taipei TW
- 专利权人: Kinik Company
- 当前专利权人: Kinik Company
- 当前专利权人地址: No. 10, Yenping South Road Taipei TW
- 代理机构: Prins, Adrianus Willem
- 优先权: US558582 20000426
- 主分类号: B24B37/04
- IPC分类号: B24B37/04 ; B24B53/12 ; B24D3/06 ; B24D7/02
摘要:
The present invention discloses a CMP pad dresser which has a plurality of uniformly spaced abrasive particles (180) protruding therefrom. The abrasive particles (180) are super hard materials, and are typically diamond, polycrystalline diamond (PCD), cubic boron nitride (cBN), or polycrystalline cubic boron nitride (PcBN). The abrasive particles (180) are attacked to a substrate (40) which may be then coated with an additional anti-corrosive layer (130). The anti-corrosive layer (130) is usually a diamond or diamond-like carbon which is coated over the surface of the disk to prevent erosion of the brazing alloy (90) by the chemical slurry used in conjunction with the CMP pad. This immunity to chemical attack allows the CMP pad dresser to dress the pad while it is polishing a workpiece. In addition to even spacing on the substrate (40), the abrasive particles (180) extend for a uniform distance away from the substrate (40), allowing for even grooming or dressing of a CMP pad both in vertical and horizontal directions. A method of producing such a CMP pad dresser is also disclosed.
公开/授权文献
- EP1151825A3 A diamond grid cmp pad dresser 公开/授权日:2004-03-31
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