发明公开
- 专利标题： Electrostatically actuated devices
- 专利标题（中）： Elektrostatischgesteuerte Vorrichtungen
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申请号： EP01308476.9申请日： 2001-10-03
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公开(公告)号： EP1199174A1公开(公告)日： 2002-04-24
- 发明人: Kubby, Joel A. , Eklund, Elliott A. , Gulvin, Peter M.
- 申请人： Xerox Corporation
- 申请人地址： Xerox Square - 20A, 100 Clinton Avenue South Rochester, New York 14644 US
- 专利权人： Xerox Corporation
- 当前专利权人： Xerox Corporation
- 当前专利权人地址： Xerox Square - 20A, 100 Clinton Avenue South Rochester, New York 14644 US
- 代理机构： Rackham, Stephen Neil
- 优先权： US687096 20001016
- 主分类号： B41J2/14
- IPC分类号： B41J2/14
摘要：
An electrostatic injet head (10) having an inner structure (56) on the bottom of the top (53) of the membrane (50) for isolating it for the conductor (40), and an outer structure (58), away from the center of the membrane (50), on the bottom of the top (53) of the membrane (50) to stop excessive flexing of the membrane (50) leading to inter-electrode contact. The invention can be used in various silicon-based actuators, including fluid pumps and optical switching devices.
公开/授权文献
- EP1199174B1 Electrostatically actuated devices 公开/授权日：2008-05-21
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