摘要:
An improved spectrophotometer for non-contact measuring of the colors of colored target areas, especially, test patches on moving printed test sheets in an unrestrained normal output path of a color printer, which test patches may be sequentially angularly illuminated with multiple different colors, with a photosensor providing electrical signals in response, the spectrophotometer having a lens system for transmitting that reflected illumination from the test patch to the photosensor with a lens magnification ratio of approximately one to one. The exemplary spectrophotometer provides non-contact color measurements of moving color target areas variably displaced therefrom within normal paper path baffle spacings, with a displacement insensitivity of at least 6 millimeters about a nominal target to spectrophotometer separation.
摘要:
A MEMS-based adjustable mirror module allows faster, lower cost, and easier alignment of optical fibers (10) in substrates. Movable mirrors (131,133) formed on the substrate allow adjustment of the light path after the optical fiber is attached, after which the mirrors are affixed in place to prevent misalignment.
摘要:
The present invention provides a micromechanical or microoptomechanical structure. The structure is produced by a process comprising defining a structure on a single crystal silicon layer separated by an insulator layer from a substrate layer; depositing and etching a polysilicon layer on the single crystal silicon layer, with remaining polysilcon forming mechanical or optical elements of the structure; exposing a selected area of the single crystal silicon layer; and releasing the formed structure.
摘要:
An electrostatic injet head (10) having an inner structure (56) on the bottom of the top (53) of the membrane (50) for isolating it for the conductor (40), and an outer structure (58), away from the center of the membrane (50), on the bottom of the top (53) of the membrane (50) to stop excessive flexing of the membrane (50) leading to inter-electrode contact. The invention can be used in various silicon-based actuators, including fluid pumps and optical switching devices.
摘要:
A silicon structure is at least partially thermally isolated from a substrate (210) by a gap (232) formed in an insulation layer (230) disposed between the substrate (210) and a silicon layer (220) in which the silicon structure is formed. In embodiments, the substrate (210) is made of silicon and the silicon layer (220) is made of single crystal silicon. In embodiments, the gap (232) is formed such that a surface of the substrate (210) under the gap (232) is maintained substantially unetched. In other embodiments, the gap (232) is formed without affecting the surface of the substrate (210) underlying the gap (232). In particular, the gap (232) may be formed by removing a portion of the insulation layer (230) with an etch that does not affect the surface of the substrate (210) underlying the gap. In embodiments the etch is highly selective between the material of the insulation layer (230) and the material of the substrate (210). The etch selectivity may be about 20:1 or greater.
摘要:
The present invention provides a micromechanical or microoptomechanical structure produced by a process comprising defining the structure in a single-crystal silicon layer separated by an insulator layer from a substrate layer; selectively etching the single crystal silicon layer; depositing and etching a polysilicon layer on the insulator layer, with remaining polysilicon forming mechanical elements of the structure; metalizing a backside of the structure; and releasing the formed structure.