发明公开
EP1201607A4 METHOD FOR PRODUCING CERIUM OXIDE, CERIUM OXIDE ABRASIVE, METHOD FOR POLISHING SUBSTRATE USING THE SAME AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
有权
PROCESS FOR抛光底上方利用AND METHOD FOR制造半导体部件用氧化铈,CERIUMOXIDHALTIGES SCHLEIFMITTEL,METHOD
- 专利标题: METHOD FOR PRODUCING CERIUM OXIDE, CERIUM OXIDE ABRASIVE, METHOD FOR POLISHING SUBSTRATE USING THE SAME AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- 专利标题(中): PROCESS FOR抛光底上方利用AND METHOD FOR制造半导体部件用氧化铈,CERIUMOXIDHALTIGES SCHLEIFMITTEL,METHOD
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申请号: EP00931580申请日: 2000-05-26
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公开(公告)号: EP1201607A4公开(公告)日: 2004-04-14
- 发明人: MATSUZAWA JUN , SUGIMOTO ATSUSHI , YOSHIDA MASATO , HIRAI KEIZOU , ASHIZAWA TORANOSUKE , OOTSUKI YUUTO
- 申请人: HITACHI CHEMICAL CO LTD
- 专利权人: HITACHI CHEMICAL CO LTD
- 当前专利权人: HITACHI CHEMICAL CO LTD
- 优先权: JP15004999 1999-05-28; JP24339899 1999-08-30
- 主分类号: B24B37/00
- IPC分类号: B24B37/00 ; C01F17/00 ; C09K3/14 ; H01L21/304
摘要:
A method for producing a cerium oxide, characterized as comprising heating a cerium salt at a high speed up to a burning temperature, followed by burning; a cerium oxide abrasive comprising a cerium oxide produced by the method and pure water; an abrasive containing a slurry comprising a medium and, dispersed therein, cerium oxide particles having, in a powder X-ray diffraction chart, an intensity ratio of the area of a primary peak appearing at 27 to 30° to that of a secondary peak appearing at 32 to 35° (primary peak/secondary peak) of 3.20 or more; an abrasive containing a slurry comprising a medium and, dispersed therein, cerium oxide particles having a bulk density of 6.5 g/cm3 or less; an abrasive containing a slurry comprising a medium and, dispersed therein, abrasive grains having pores; a method for polishing a substrate, characterized as comprising polishing a specific substrate using the above abrasive; and a method for manufacturing a semiconductor device, characterized as comprising a step of polishing with the above abrasive.
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