发明公开
EP1201607A4 METHOD FOR PRODUCING CERIUM OXIDE, CERIUM OXIDE ABRASIVE, METHOD FOR POLISHING SUBSTRATE USING THE SAME AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE 有权
PROCESS FOR抛光底上方利用AND METHOD FOR制造半导体部件用氧化铈,CERIUMOXIDHALTIGES SCHLEIFMITTEL,METHOD

METHOD FOR PRODUCING CERIUM OXIDE, CERIUM OXIDE ABRASIVE, METHOD FOR POLISHING SUBSTRATE USING THE SAME AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要:
A method for producing a cerium oxide, characterized as comprising heating a cerium salt at a high speed up to a burning temperature, followed by burning; a cerium oxide abrasive comprising a cerium oxide produced by the method and pure water; an abrasive containing a slurry comprising a medium and, dispersed therein, cerium oxide particles having, in a powder X-ray diffraction chart, an intensity ratio of the area of a primary peak appearing at 27 to 30° to that of a secondary peak appearing at 32 to 35° (primary peak/secondary peak) of 3.20 or more; an abrasive containing a slurry comprising a medium and, dispersed therein, cerium oxide particles having a bulk density of 6.5 g/cm3 or less; an abrasive containing a slurry comprising a medium and, dispersed therein, abrasive grains having pores; a method for polishing a substrate, characterized as comprising polishing a specific substrate using the above abrasive; and a method for manufacturing a semiconductor device, characterized as comprising a step of polishing with the above abrasive.
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