发明公开
EP1202357A2 Magnetoresistive element, method for manufacturing the same, and method for forming a compound magnetic thin film
审中-公开
磁阻元件,制造方法,以及用于Herstelung磁性Verbindingsdünnschicht方法
- 专利标题: Magnetoresistive element, method for manufacturing the same, and method for forming a compound magnetic thin film
- 专利标题(中): 磁阻元件,制造方法,以及用于Herstelung磁性Verbindingsdünnschicht方法
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申请号: EP01307686.4申请日: 2001-09-10
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公开(公告)号: EP1202357A2公开(公告)日: 2002-05-02
- 发明人: Hiramoto, Masayoshi , Matukawa, Nozomu , Sakakima, Hiroshi , Iijima, Kenji , Adachi, Hideaki , Satomi, Mitsuo
- 申请人: Matsushita Electric Industrial Co., Ltd.
- 申请人地址: 1006-banchi, Oaza-Kadoma Kadoma-shi, Osaka-fu, 571-8501 JP
- 专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址: 1006-banchi, Oaza-Kadoma Kadoma-shi, Osaka-fu, 571-8501 JP
- 代理机构: Tothill, John Paul
- 优先权: JP2000274619 20000911
- 主分类号: H01L43/08
- IPC分类号: H01L43/08 ; H01L43/10 ; H01L43/12
摘要:
The invention provides a magnetoresistive element in which a pinned magnetic layer (15 or 17) includes at least one non-magnetic film and magnetic films, and the magnetic films are coupled with one another by magnetostatic coupling. Furthermore, the invention provides a magnetoresistive element in which the magnetic films in the pinned magnetic layer (15 or 17) are coupled with on another by magnetostatic or antiferromagnetic coupling generating negative magnetic coupling. Furthermore, the invention provides a magnetoresistive element in which at least one of the magnetic layers (15, 17) includes an oxide ferrite having a plane orientation with a (100), (110) or (111) plane. A magnetic field is introduced in the plane. This oxide can be formed by sputtering with an oxide target while applying a bias voltage to a substrate including a plane on which the oxide ferrite is to be formed so as to adjust the amount of oxygen supplied to the oxide ferrite.
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