发明公开
EP1205782A2 Optically tunable Fabry-Perot micro-electromechanical resonator
审中-公开
光学可调法布里 - 珀罗微机电谐振器
- 专利标题: Optically tunable Fabry-Perot micro-electromechanical resonator
- 专利标题(中): 光学可调法布里 - 珀罗微机电谐振器
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申请号: EP01114653.7申请日: 2001-06-19
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公开(公告)号: EP1205782A2公开(公告)日: 2002-05-15
- 发明人: Tucker, Rodney S. , Sorin, Wayne V.
- 申请人: Agilent Technologies, Inc. (a Delaware corporation)
- 申请人地址: 395 Page Mill Road Palo Alto, CA 94303 US
- 专利权人: Agilent Technologies, Inc. (a Delaware corporation)
- 当前专利权人: Agilent Technologies, Inc. (a Delaware corporation)
- 当前专利权人地址: 395 Page Mill Road Palo Alto, CA 94303 US
- 代理机构: Liesegang, Eva
- 优先权: US704004 20001101
- 主分类号: G02B26/02
- IPC分类号: G02B26/02 ; G02B5/28 ; G01J3/26 ; G02F1/21
摘要:
A tunable optical resonator whose resonance frequency is determined by a light signal introduced into the resonator. The resonator includes an optical cavity[10, 306] having a first mirror[13] and a second mirror[14]. The first mirror[13] and second mirror[14] are supported relative to one another such that the distance between the first and second mirrors may be altered by applying a force to said second mirror[14] thereby altering the resonance frequency of said cavity. The resonator includes a light input port[13] for receiving a tuning light signal, and a light signal generator for generating the tuning light source[302]. The tuning light signal is introduced into the optical cavity[10,306] such that the tuning light signal is reflected between the first and second mirrors. In the absence of the tuning light signal, the resonator has a resonance characterized by a resonance response curve centered at λ 0 . The tuning light signal has a wavelength λ 1 within said resonance response curve and sufficient power to cause said resonance response curve to shift such that the resonance response curve is now centered at λ 2 , where λ 2 >λ 1 . In one embodiment of the invention, a circuit[403] for monitoring the light leaving the resonator is utilized to control the wavelength and/or amplitude of the tuning light signal such that the light leaving the resonator has a predetermined wavelength.
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