发明公开
EP1215048A3 Bubble-jet type ink-jet printhead and manufacturing method thereof
有权
有气泡喷墨打印头和相关联的驱动Hertsellungsverfahren
- 专利标题: Bubble-jet type ink-jet printhead and manufacturing method thereof
- 专利标题(中): 有气泡喷墨打印头和相关联的驱动Hertsellungsverfahren
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申请号: EP01310427.8申请日: 2001-12-13
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公开(公告)号: EP1215048A3公开(公告)日: 2003-03-12
- 发明人: Maeng, Doo-jin , Kuk, Keon , Oh, Yong-soo , Kim, Hyeon-cheol
- 申请人: SAMSUNG ELECTRONICS Co. Ltd.
- 申请人地址: 416 Maetong-dong, Paldal-gu, Suwon-shi Kyungki-do, Seoul KR
- 专利权人: SAMSUNG ELECTRONICS Co. Ltd.
- 当前专利权人: SAMSUNG ELECTRONICS Co. Ltd.
- 当前专利权人地址: 416 Maetong-dong, Paldal-gu, Suwon-shi Kyungki-do, Seoul KR
- 代理机构: Kyle, Diana
- 优先权: KR2000077167 20001215; KR2001003161 20010119
- 主分类号: B41J2/14
- IPC分类号: B41J2/14 ; B41J2/16
摘要:
A bubble-jet type ink-jet printhead and manufacturing method thereof are provided. The bubble-jet type ink-jet printhead includes a substrate (110) integrally having an ink supply manifold (112), an ink chamber (114), and an ink channel (116). A nozzle plate (120) having a nozzle (122) is stacked on the substrate. A heater (130) formed in an annular shape and centered around the nozzle and an electrode (150) for applying current to the heater are formed on the nozzle plate. An adiabatic layer (160) is formed on the heater for preventing heat generated by the heater from being conducted upward from the heater. Alternatively, a bubble-jet type ink-jet printhead may be formed on a silicon-on-insulator (SOI) wafer having a first substrate, an oxide layer, and a second substrate stacked thereon. The first substrate integrally has a manifold, an ink chamber, and an ink channel. A nozzle is formed in the oxide layer and the second substrate. An adiabatic barrier is formed on the second substrate by limiting a portion of the second substrate in the shape of an annulus for forming an annular heater centered around the nozzle. In the bubble-jet type ink-jet printhead and manufacturing method thereof, the adiabatic layer or the adiabatic barrier is provided to transmit most of the heat generated by the heater to ink under the heater, thereby increasing energy efficiency.
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