摘要:
A thermally-driven ink-jet printhead is provided. The thermally-driven ink-jet printhead comprises a substrate (110) on which an ink chamber (106) to be filled with ink to be ejected, a manifold (102) for supplying ink to the ink chamber (106), and an ink channel (104) for connecting the ink chamber (106) and the manifold (102) are formed; first sidewalls (111) and second sidewalls (112), which are formed to a predetermined depth from the surface of the substrate (110) and surround the ink chamber (106) to have a rectangular shape, the first sidewalls (111) being disposed in a widthwise direction of the ink chamber and the second sidewalls (112) being disposed in a lengthwise direction of the ink chamber (106); a nozzle plate (120), which is formed of a plurality of material layers stacked on the substrate and through which a nozzle (108) connected to the ink chamber (106) is formed; a heater (122), which is disposed between the nozzle (108) and each of the first sidewalls (111) inside the nozzle plate (120) to be positioned above the ink chamber; and a conductor (124), which is disposed inside the nozzle plate and electrically connected to the heater (122). Inner surfaces of each of the first sidewalls are uneven, or a pocket is formed in each of the first sidewalls.
摘要:
Provided are an inkjet printhead and a method of manufacturing the same. The inkjet printhead includes a substrate (100), which includes an ink chamber (106) formed in an upper portion thereof to store ink, a manifold (110) formed in a lower portion thereof to supply the ink to the ink chamber, and an ink channel (108) formed between the ink chamber and the manifold to connect the ink chamber to the manifold, a nozzle plate (120), which includes a plurality of passivation layers (121,123,125) stacked on the substrate, a heat dissipation layer (127) disposed on the plurality of passivation layers and made of a thermal conductive metal material, and a nozzle (104) passing therethrough and connected to the ink chamber, and a heater (122) and a conductor (124), each of which is interposed between the plurality of passivation layers of the nozzle plate, the heater heating the ink filled in the ink chamber and the conductor applying current to the heater. The heat dissipation layer includes a first metal layer (127a) formed on the plurality of passivation layers and a second metal layer (127b) formed on the first metal layer.
摘要:
An ink-jet printhead and a method for manufacturing the same are provided. The ink-jet printhead includes a substrate (100) on which an ink chamber (106) filled with ink to be ejected is formed on a surface of the substrate, a manifold (102) for supplying ink to the ink chamber is formed on a rear surface of the substrate, and an ink passage (105) for connecting the ink chamber to the manifold is formed parallel to the surface of the substrate, and a nozzle plate (114) stacked on the substrate, in which a nozzle (104) through which ink is ejected from the ink chamber is formed, a heater (108) and an electrode (112) electrically connected to the heater, for applying current to the heater, are arranged.
摘要:
A monolithic ink-jet printhead and a manufacturing method thereof are provided. The ink-jet printhead includes a substrate having an ink chamber, a manifold and an ink channel, a barrier wall formed on the front surface of the substrate to a predetermined depth and defining at least a part of the ink chamber widthwise, a nozzle plate comprised of a plurality of material layers stacked on the substrate and having a nozzle penetrating the nozzle plate, the nozzle through which ink is ejected from the ink chamber, and a heater and a conductor provided between the material layers of the nozzle plate. The nozzle plate is constructed integrally with the substrate, and the ink chamber is formed by isotropically etching the substrate exposed through the nozzle using the barrier wall as an etch stop. Since a narrow, long, deep ink chamber is formed, a spacing between adjacent nozzles can be reduced, thereby realizing an ink-jet printhead capable of printing higher resolution of images with a high level of DPI.
摘要:
A bubble-jet type ink-jet printhead and manufacturing method thereof are provided. The bubble-jet type ink-jet printhead includes a substrate (110) integrally having an ink supply manifold (112), an ink chamber (114), and an ink channel (116). A nozzle plate (120) having a nozzle (122) is stacked on the substrate. A heater (130) formed in an annular shape and centered around the nozzle and an electrode (150) for applying current to the heater are formed on the nozzle plate. An adiabatic layer (160) is formed on the heater for preventing heat generated by the heater from being conducted upward from the heater. Alternatively, a bubble-jet type ink-jet printhead may be formed on a silicon-on-insulator (SOI) wafer having a first substrate, an oxide layer, and a second substrate stacked thereon. The first substrate integrally has a manifold, an ink chamber, and an ink channel. A nozzle is formed in the oxide layer and the second substrate. An adiabatic barrier is formed on the second substrate by limiting a portion of the second substrate in the shape of an annulus for forming an annular heater centered around the nozzle. In the bubble-jet type ink-jet printhead and manufacturing method thereof, the adiabatic layer or the adiabatic barrier is provided to transmit most of the heat generated by the heater to ink under the heater, thereby increasing energy efficiency.