Thermally-driven ink-jet printhead without cavitation damage of heater
    4.
    发明公开
    Thermally-driven ink-jet printhead without cavitation damage of heater 审中-公开
    热喷墨打印头通过加热元件以减少气穴

    公开(公告)号:EP1491341A3

    公开(公告)日:2005-08-17

    申请号:EP04253726.6

    申请日:2004-06-22

    IPC分类号: B41J2/14

    摘要: A thermally-driven ink-jet printhead is provided. The thermally-driven ink-jet printhead comprises a substrate (110) on which an ink chamber (106) to be filled with ink to be ejected, a manifold (102) for supplying ink to the ink chamber (106), and an ink channel (104) for connecting the ink chamber (106) and the manifold (102) are formed; first sidewalls (111) and second sidewalls (112), which are formed to a predetermined depth from the surface of the substrate (110) and surround the ink chamber (106) to have a rectangular shape, the first sidewalls (111) being disposed in a widthwise direction of the ink chamber and the second sidewalls (112) being disposed in a lengthwise direction of the ink chamber (106); a nozzle plate (120), which is formed of a plurality of material layers stacked on the substrate and through which a nozzle (108) connected to the ink chamber (106) is formed; a heater (122), which is disposed between the nozzle (108) and each of the first sidewalls (111) inside the nozzle plate (120) to be positioned above the ink chamber; and a conductor (124), which is disposed inside the nozzle plate and electrically connected to the heater (122). Inner surfaces of each of the first sidewalls are uneven, or a pocket is formed in each of the first sidewalls.

    Inkjet printhead and method of manufacturing the same
    5.
    发明公开
    Inkjet printhead and method of manufacturing the same 有权
    Tintenstrahldruckkopf unddazugehörigesHerstellungsverfahren

    公开(公告)号:EP1502746A1

    公开(公告)日:2005-02-02

    申请号:EP04254512.9

    申请日:2004-07-28

    IPC分类号: B41J2/16 B41J2/14

    摘要: Provided are an inkjet printhead and a method of manufacturing the same. The inkjet printhead includes a substrate (100), which includes an ink chamber (106) formed in an upper portion thereof to store ink, a manifold (110) formed in a lower portion thereof to supply the ink to the ink chamber, and an ink channel (108) formed between the ink chamber and the manifold to connect the ink chamber to the manifold, a nozzle plate (120), which includes a plurality of passivation layers (121,123,125) stacked on the substrate, a heat dissipation layer (127) disposed on the plurality of passivation layers and made of a thermal conductive metal material, and a nozzle (104) passing therethrough and connected to the ink chamber, and a heater (122) and a conductor (124), each of which is interposed between the plurality of passivation layers of the nozzle plate, the heater heating the ink filled in the ink chamber and the conductor applying current to the heater. The heat dissipation layer includes a first metal layer (127a) formed on the plurality of passivation layers and a second metal layer (127b) formed on the first metal layer.

    摘要翻译: 提供一种喷墨打印头及其制造方法。 喷墨打印头包括:基板(100),其包括形成在其上部的墨水室(106),用于存储墨水;形成在其下部的歧管(110),以将墨水供应到墨水室;以及 在所述墨室和所述歧管之间形成的墨水通道(108),用于将所述墨水室连接到所述歧管;喷嘴板(120),其包括堆叠在所述基板上的多个钝化层(121,123,125),散热层 )设置在所述多个钝化层上并由导热金属材料制成,以及通过其并连接到所述墨室的喷嘴(104)以及加热器(122)和导体(124),所述加热器(122)和导体 在喷嘴板的多个钝化层之间,加热器加热填充在墨水室中的墨水和导体向加热器施加电流。 散热层包括形成在多个钝化层上的第一金属层(127a)和形成在第一金属层上的第二金属层(127b)。

    Ink-jet printhead and method for manufacturing the same
    6.
    发明公开
    Ink-jet printhead and method for manufacturing the same 有权
    Tintenstrahldruckkopf unddazugehörigesHerstellungsverfahren

    公开(公告)号:EP1413439A1

    公开(公告)日:2004-04-28

    申请号:EP03256679.6

    申请日:2003-10-23

    IPC分类号: B41J2/14 B41J2/16

    摘要: An ink-jet printhead and a method for manufacturing the same are provided. The ink-jet printhead includes a substrate (100) on which an ink chamber (106) filled with ink to be ejected is formed on a surface of the substrate, a manifold (102) for supplying ink to the ink chamber is formed on a rear surface of the substrate, and an ink passage (105) for connecting the ink chamber to the manifold is formed parallel to the surface of the substrate, and a nozzle plate (114) stacked on the substrate, in which a nozzle (104) through which ink is ejected from the ink chamber is formed, a heater (108) and an electrode (112) electrically connected to the heater, for applying current to the heater, are arranged.

    摘要翻译: 一种喷墨打印头包括一个包括一个墨水室的基底(100),一个用于供应墨水的歧管(102)和一个墨水通道; 以及包括喷嘴(104)的喷嘴板(114)和电连接到加热器(108)的电极。 喷墨打印头包括在其表面上形成有填充有待喷射的油墨的油墨室的基板,在基板的后表面上形成用于向油墨室供墨的歧管和用于连接的油墨通道 到歧管的墨室形成为平行于基片的表面; 以及在基板上堆叠喷嘴板,其中形成有从墨水室喷射墨水的喷嘴,加热器和电连接到加热器的电极用于向加热器施加电流。 还包括用于制造喷墨打印头的独立权利要求,包括在基板的表面上形成具有预定深度的牺牲层; 在其上形成有牺牲层的基板的表面上堆叠喷嘴板,将加热器和电连接到加热器的电极布置在喷嘴板上,并通过在喷嘴板中形成喷嘴而暴露牺牲层; 在所述基板的后表面上形成歧管; 通过蚀刻通过喷嘴暴露的牺牲层来形成墨水室和墨水通道; 并将歧管连接到墨水通道。

    Monolithic ink-jet printhead with ink chamber defined by barrier wall and manufacturing method thereof
    7.
    发明公开
    Monolithic ink-jet printhead with ink chamber defined by barrier wall and manufacturing method thereof 有权
    一种单片的喷墨打印头与墨室由边界壁限定,它们的制备方法

    公开(公告)号:EP1407883A1

    公开(公告)日:2004-04-14

    申请号:EP03256419.7

    申请日:2003-10-10

    IPC分类号: B41J2/14 B41J2/16

    摘要: A monolithic ink-jet printhead and a manufacturing method thereof are provided. The ink-jet printhead includes a substrate having an ink chamber, a manifold and an ink channel, a barrier wall formed on the front surface of the substrate to a predetermined depth and defining at least a part of the ink chamber widthwise, a nozzle plate comprised of a plurality of material layers stacked on the substrate and having a nozzle penetrating the nozzle plate, the nozzle through which ink is ejected from the ink chamber, and a heater and a conductor provided between the material layers of the nozzle plate. The nozzle plate is constructed integrally with the substrate, and the ink chamber is formed by isotropically etching the substrate exposed through the nozzle using the barrier wall as an etch stop. Since a narrow, long, deep ink chamber is formed, a spacing between adjacent nozzles can be reduced, thereby realizing an ink-jet printhead capable of printing higher resolution of images with a high level of DPI.

    摘要翻译: 一种单片喷墨打印头包括基板(110),形成在该基片的阻挡壁(131),则之间设置的喷嘴板(120)所包括的材料层和具有喷嘴(138)和一个导体(144) 材料层和连接到用于跨越加热器施加电流的加热器(142)。 一种单片喷墨打印头包括:具有填充有墨水的墨水腔室(132)(I)的底物在其前表面被喷射,用于供墨到在其后表面上的墨室的歧管(136),和向墨 墨室和所述歧管之间的信道(134); (二)形成的基板的前表面上,以一个深度的阻挡壁预定的和限定墨腔室宽度的一部分; (三)的喷嘴板包括堆叠在衬底和材料层的具有喷嘴穿透喷嘴板,通过它墨水从墨室喷出的喷嘴; 与材料层之间提供(ⅳ)的导体和连接到一个加热器,用于跨越加热器施加电流。 因此独立claimsoft包括用于制造单片喷墨印刷头的方法,包括:(a)制备一基片; (B)形成由从衬底的材料不同的预定材料构成的阻挡壁; (C)一体地形成由材料层的喷嘴板和具有喷嘴穿透的材料层,并形成一个加热器和连接到该材料层之间的加热器的导体; (D)上形成由各向同性地蚀刻使用阻挡壁,以蚀刻停止通过喷嘴露出的基板由阻挡壁限定墨水腔室; (F)形成用于通过蚀刻所述基板的后表面供给墨的歧管; 及(g)通过蚀刻所述衬底上形成墨水通道的所以并穿透所述歧管和第墨腔室之间的基板。

    Bubble-jet type ink-jet printhead and manufacturing method thereof
    8.
    发明公开
    Bubble-jet type ink-jet printhead and manufacturing method thereof 有权
    有气泡喷墨打印头和相关联的驱动Hertsellungsverfahren

    公开(公告)号:EP1215048A3

    公开(公告)日:2003-03-12

    申请号:EP01310427.8

    申请日:2001-12-13

    IPC分类号: B41J2/14 B41J2/16

    摘要: A bubble-jet type ink-jet printhead and manufacturing method thereof are provided. The bubble-jet type ink-jet printhead includes a substrate (110) integrally having an ink supply manifold (112), an ink chamber (114), and an ink channel (116). A nozzle plate (120) having a nozzle (122) is stacked on the substrate. A heater (130) formed in an annular shape and centered around the nozzle and an electrode (150) for applying current to the heater are formed on the nozzle plate. An adiabatic layer (160) is formed on the heater for preventing heat generated by the heater from being conducted upward from the heater. Alternatively, a bubble-jet type ink-jet printhead may be formed on a silicon-on-insulator (SOI) wafer having a first substrate, an oxide layer, and a second substrate stacked thereon. The first substrate integrally has a manifold, an ink chamber, and an ink channel. A nozzle is formed in the oxide layer and the second substrate. An adiabatic barrier is formed on the second substrate by limiting a portion of the second substrate in the shape of an annulus for forming an annular heater centered around the nozzle. In the bubble-jet type ink-jet printhead and manufacturing method thereof, the adiabatic layer or the adiabatic barrier is provided to transmit most of the heat generated by the heater to ink under the heater, thereby increasing energy efficiency.