发明公开
EP1216837A1 Method for manufacturing ink-jet printhead having hemispherical ink chamber
有权
赫尔斯特伦·芬德·芬特伦·芬兰·蒂森·克伦
- 专利标题: Method for manufacturing ink-jet printhead having hemispherical ink chamber
- 专利标题(中): 赫尔斯特伦·芬德·芬特伦·芬兰·蒂森·克伦
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申请号: EP01310421.1申请日: 2001-12-13
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公开(公告)号: EP1216837A1公开(公告)日: 2002-06-26
- 发明人: Lee, Sang-wook , Oh, Yong-soo , Kim, Hyeon-cheol
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: 416, Maetan-dong, Paldal-gu Suwon-City, Kyungki-do KR
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: 416, Maetan-dong, Paldal-gu Suwon-City, Kyungki-do KR
- 代理机构: Ertl, Nicholas Justin
- 优先权: KR2000077744 20001218
- 主分类号: B41J2/16
- IPC分类号: B41J2/16
摘要:
A method for manufacturing an ink-jet printhead having a hemispherical ink chamber is provided. A nozzle plate (120) is formed on the surface of substrate (110). A ring-shaped heater (130) is formed on the nozzle plate. A manifold (112) for supplying ink is formed by etching the substrate. An electrode (150) is formed on the nozzle plate to be electrically connected to the heater. A nozzle (122), through which ink will be ejected, is formed by etching the nozzle plate inside the heater to have a diameter smaller than the diameter of the heater. A groove (124) for forming an ink channel is formed to expose the substrate by etching the nozzle plate so that the groove extends from the outside of the heater toward the manifold. An ink chamber is formed to have a diameter greater than the diameter of the heater and be almost hemispherical by etching the substrate exposed by the nozzle. An ink channel is formed to connect the ink chamber and the manifold by isotropically etching the substrate exposed by the groove. The groove is closed by forming a first material layer (180) on the nozzle plate. Here, the first material layer is introduced to prevent ink from leaking out through the groove and may be a silicon nitride layer or a silicon oxide layer.
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