摘要:
A bubble-jet type ink-jet printhead and manufacturing method thereof are provided. The bubble-jet type ink-jet printhead includes a substrate (110) integrally having an ink supply manifold (112), an ink chamber (114), and an ink channel (116). A nozzle plate (120) having a nozzle (122) is stacked on the substrate. A heater (130) formed in an annular shape and centered around the nozzle and an electrode (150) for applying current to the heater are formed on the nozzle plate. An adiabatic layer (160) is formed on the heater for preventing heat generated by the heater from being conducted upward from the heater. Alternatively, a bubble-jet type ink-jet printhead may be formed on a silicon-on-insulator (SOI) wafer having a first substrate, an oxide layer, and a second substrate stacked thereon. The first substrate integrally has a manifold, an ink chamber, and an ink channel. A nozzle is formed in the oxide layer and the second substrate. An adiabatic barrier is formed on the second substrate by limiting a portion of the second substrate in the shape of an annulus for forming an annular heater centered around the nozzle. In the bubble-jet type ink-jet printhead and manufacturing method thereof, the adiabatic layer or the adiabatic barrier is provided to transmit most of the heat generated by the heater to ink under the heater, thereby increasing energy efficiency.
摘要:
An ink-jet printhead is provided. The ink-jet printhead includes a nozzle plate 100 having a nozzle 102, a substrate 120 having an ink feed hole 122, and an intermediate layer 110 interposed between the nozzle plate 100 and the substrate 120. The intermediate layer 110 includes an ink chamber 115 connected to the ink feed hole 122 and the nozzle 102 and a heating element 112, 116 surrounding the ink chamber. Here, the nozzle 102, the ink chamber 115, and the ink feed hole 122 are formed in a straight channel, thereby providing high density printhead.
摘要:
An ink-jet printhead is provided. The ink-jet printhead includes a nozzle plate 100 having a nozzle 102, a substrate 120 having an ink feed hole 122, and an intermediate layer 110 interposed between the nozzle plate 100 and the substrate 120. The intermediate layer 110 includes an ink chamber 115 connected to the ink feed hole 122 and the nozzle 102 and a heating element 112, 116 surrounding the ink chamber. Here, the nozzle 102, the ink chamber 115, and the ink feed hole 122 are formed in a straight channel, thereby providing high density printhead.
摘要:
An ink-jet printhead having a hemispherical ink chamber (114) and a method for manufacturing the same are provided. The ink-jet printhead includes a substrate (110), in which a manifold (112) for supplying ink, an ink chamber (114) having a substantially hemispherical shape and filled with ink to be ejected, and an ink channel (116) for supplying ink from the manifold (112) to the ink chamber (114) are formed to be integrated into one body, a nozzle plate (120) formed to have a multilayered structure, in which a first insulating layer (126), a thermally conductive layer (127) formed of a thermally conductive material, and a second insulating layer (128) are sequentially stacked, and having a nozzle (122), through which ink is ejected, formed at a location corresponding to the center of the ink chamber (114), a nozzle guide (130) having a multilayered structure and extending from the edge of the nozzle to the inside of the ink chamber, a heater (140) formed on the nozzle plate (120) to surround the nozzle, and an electrode formed on the nozzle plate to be electrically connected to the heater (140) and supply current to the heater (140). The nozzle guide (130) is formed by extending the thermally conductive (127) layer and the first insulating layer (126) of the nozzle plate (120), and the thermally conductive layer is formed to have a multilayered structure, in which the thermally conductive layer is surrounded by the first insulating layer. Accordingly, it is possible to satisfy requirements of a printhead. In addition, since the nozzle guide (130) is strong enough to not be deformed and heat can be quickly discharged through the thermally conductive layer, it is possible to increase the driving frequency of the printhead.
摘要:
A bubble-jet type ink-jet printhead and manufacturing method thereof are provided. The bubble-jet type ink-jet printhead includes a substrate (110) integrally having an ink supply manifold (112), an ink chamber (114), and an ink channel (116). A nozzle plate (120) having a nozzle (122) is stacked on the substrate. A heater (130) formed in an annular shape and centered around the nozzle and an electrode (150) for applying current to the heater are formed on the nozzle plate. An adiabatic layer (160) is formed on the heater for preventing heat generated by the heater from being conducted upward from the heater. Alternatively, a bubble-jet type ink-jet printhead may be formed on a silicon-on-insulator (SOI) wafer having a first substrate, an oxide layer, and a second substrate stacked thereon. The first substrate integrally has a manifold, an ink chamber, and an ink channel. A nozzle is formed in the oxide layer and the second substrate. An adiabatic barrier is formed on the second substrate by limiting a portion of the second substrate in the shape of an annulus for forming an annular heater centered around the nozzle. In the bubble-jet type ink-jet printhead and manufacturing method thereof, the adiabatic layer or the adiabatic barrier is provided to transmit most of the heat generated by the heater to ink under the heater, thereby increasing energy efficiency.
摘要:
An ink-jet printhead having a hemispherical ink chamber (114) and a method for manufacturing the same are provided. The ink-jet printhead includes a substrate (110), in which a manifold (112) for supplying ink, an ink chamber (114) having a substantially hemispherical shape and filled with ink to be ejected, and an ink channel (116) for supplying ink from the manifold (112) to the ink chamber (114) are formed to be integrated into one body, a nozzle plate (120) formed to have a multilayered structure, in which a first insulating layer (126), a thermally conductive layer (127) formed of a thermally conductive material, and a second insulating layer (128) are sequentially stacked, and having a nozzle (122), through which ink is ejected, formed at a location corresponding to the center of the ink chamber (114), a nozzle guide (130) having a multilayered structure and extending from the edge of the nozzle to the inside of the ink chamber, a heater (140) formed on the nozzle plate (120) to surround the nozzle, and an electrode formed on the nozzle plate to be electrically connected to the heater (140) and supply current to the heater (140). The nozzle guide (130) is formed by extending the thermally conductive (127) layer and the first insulating layer (126) of the nozzle plate (120), and the thermally conductive layer is formed to have a multilayered structure, in which the thermally conductive layer is surrounded by the first insulating layer. Accordingly, it is possible to satisfy requirements of a printhead. In addition, since the nozzle guide (130) is strong enough to not be deformed and heat can be quickly discharged through the thermally conductive layer, it is possible to increase the driving frequency of the printhead.