发明授权
- 专利标题: IMPEDANCE DETECTOR CIRCUIT, IMPEDANCE DETECTOR AND METHOD OF IMPEDANCE DETECTION
- 专利标题(中): 阻抗测量电路,阻抗测量探测器和方法
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申请号: EP01912131.8申请日: 2001-03-07
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公开(公告)号: EP1219967B1公开(公告)日: 2007-07-25
- 发明人: YAKABE, Masami , MATSUMOTO, Toshiyuki , HIROTA, Yoshihiro , NAKANO, Koichi
- 申请人: TOKYO ELECTRON LIMITED , Hokuto Electronics, Inc.
- 申请人地址: 3-6, Akasaka 5-chome Minato-ku, Tokyo 107-8481 JP
- 专利权人: TOKYO ELECTRON LIMITED,Hokuto Electronics, Inc.
- 当前专利权人: TOKYO ELECTRON LIMITED,Hokuto Electronics, Inc.
- 当前专利权人地址: 3-6, Akasaka 5-chome Minato-ku, Tokyo 107-8481 JP
- 代理机构: Balsters, Robert
- 优先权: JP2000062504 20000307
- 国际公布: WO2001067118 20010913
- 主分类号: G01R27/02
- IPC分类号: G01R27/02 ; G01R27/26 ; G01D5/24
摘要:
A second operational amplifier (11) of a core (1) has an inverting input terminal and an output terminal that are short-circuited. A signal line (19) is connected to the noninverting input terminal of the second operational amplifier. A capacitance sensor (18) is connected to the signal line (19). A first operational amplifier (12) has a noninverting input terminal grounded. The inverting input terminal of the first operational amplifier is connected to first and second resistors (15, 16) on one end. The other end of the first resistor (15) is connected to an AC voltage generator (14). The other end of the second resistor (16) is connected to the output terminal of the first operational amplifier (11). The core (1) has a signal output terminal (21) connected to an inverting amplifier (2). An addition device (3) is connected to an AC output terminal (22) of the core (1) and the inverted output terminal (42) of the inverting amplifier (2). The noninverting input terminals of the operational amplifiers (36, 40) is grounded.
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