公开(公告)号：EP1249706B1

公开(公告)日：2007-09-19

申请号：EP02252419.3

申请日：2002-04-03

申请人： Hokuto Electronics, Inc.

发明人： Nakano, Koichi, c/o Hokuto Electronics Incorp.

IPC分类号： G01R15/16 ,  G01R31/312

CPC分类号： G01R15/16 ,  G01R31/312

公开(公告)号：EP1555535A1

公开(公告)日：2005-07-20

申请号：EP02777897.6

申请日：2002-10-22

申请人： Tokyo Electron Limited ,  Hokuto Electronics, Inc.

发明人： YAKABE, Masami c/o Tokyo Electron Limited ,  NAKANO, Koichi

IPC分类号： G01R27/26 ,  G01D5/24 ,  G01N27/22 ,  H04R3/06

CPC分类号： G01R27/26

摘要： An electric potential fixing apparatus is provided that can prevent the combined total amount of electricity of a connection line between the first capacitance and the second capacitance from changing even when the electric potential of the connection line between the first capacitance and the second capacitance is fixed in the case where the first capacitance and the second capacitance are directly connected.
This electric potential fixing apparatus has the first high resistance (3) and the second high resistance (4) and includes a voltage supply circuit (1) that preserves the combined total amount of electric charge of a measuring capacitance (14) and a fixed capacitance (15) and maintains constant the electric potential of a signal line (17) that connects the measuring capacitance (14) and the fixed capacitance (15). And an output terminal (5) of the voltage supply circuit (1) is connected to the signal line (17).

摘要翻译： 提供了一种电位固定设备，其能够即使当第一电容和第二电容之间的连接线的电位被固定在第一电容和第二电容之间时，也能够防止第一电容和第二电容之间的连接线的合计总电量变化 第一电容和第二电容直接连接的情况。 该电位固定装置具有第一高电阻（3）和第二高电阻（4），并且包括电压供应电路（1），其保持测量电容（14）的总电荷总量和固定电容 （15）并且保持连接测量电容（14）和固定电容（15）的信号线（17）的电位恒定。 并且电压供应电路（1）的输出端（5）连接到信号线（17）。

公开(公告)号：EP0970387A1

公开(公告)日：2000-01-12

申请号：EP99901136.4

申请日：1999-01-22

申请人： Sumitomo Metal Industries Limited ,  Hokuto Electronics, Inc.

发明人： HIROSHIMA, Tatsuo ,  NAKANO, Koichi ,  HARADA, Muneo ,  MATSUMOTO, Toshiyuki ,  HIROTA, Yoshihiro

IPC分类号： G01R27/26

CPC分类号： G01R27/2605

摘要： A static capacitance-to-voltage converter is capable of converting a static capacitance into a voltage without suffering from a stray capacitance formed between a signal and a shielding line or a stray capacitance formed between an exposed portion of the signal line and its surroundings. The static capacitance-to-voltage converter is formed of an operational amplifier placed in an imaginary short-circuit state between an inverting input and a non-inverting input thereof; a signal line having one end connected to the inverting input and the other end capable of being connected to a static capacitance; a shielding line surrounding the signal line and connected to the non-inverting input; an alternate current signal generator for applying the non-inverting input with an alternate current signal; and zero adjusters for adjusting the output of the static capacitance-to-voltage converter to minimum when no static capacitance is connected to the signal line.

公开(公告)号：EP0970387B1

公开(公告)日：2006-05-10

申请号：EP99901136.4

申请日：1999-01-22

申请人： TOKYO ELECTRON LIMITED ,  Hokuto Electronics, Inc.

发明人： HIROSHIMA, Tatsuo ,  NAKANO, Koichi ,  HARADA, Muneo ,  MATSUMOTO, Toshiyuki ,  HIROTA, Yoshihiro

IPC分类号： G01R27/26

CPC分类号： G01R27/2605

摘要： A static capacitance-to-voltage converter is capable of converting a static capacitance into a voltage without suffering from a stray capacitance formed between a signal and a shielding line or a stray capacitance formed between an exposed portion of the signal line and its surroundings. The static capacitance-to-voltage converter is formed of an operational amplifier placed in an imaginary short-circuit state between an inverting input and a non-inverting input thereof; a signal line having one end connected to the inverting input and the other end capable of being connected to a static capacitance; a shielding line surrounding the signal line and connected to the non-inverting input; an alternate current signal generator for applying the non-inverting input with an alternate current signal; and zero adjusters for adjusting the output of the static capacitance-to-voltage converter to minimum when no static capacitance is connected to the signal line.

公开(公告)号：EP1426771A4

公开(公告)日：2005-02-02

申请号：EP02767920

申请日：2002-09-06

申请人： TOKYO ELECTRON LTD ,  HOKUTO ELECTRONICS INC

发明人： YAKABE M ,  IKEUCHI N ,  MATSUMOTO T ,  NAKANO KOICHI

IPC分类号： G01D5/24 ,  G01N27/22 ,  G01R27/26 ,  H04R3/06

CPC分类号： G01D5/24 ,  G01N27/22 ,  G01R27/2605

摘要： A capacitance measuring circuit 10 comprising an AC voltage generator 11, an operational amplifier 14 having a noninverted input terminal connected to a predetermined potential in this example, to the ground, an impedance converter 16, a resistor R1 12 connected between the AC voltage generator 11 and the inverted input terminal of the operational amplifier 14, a resistor R2 13 connected between the inverted output terminal of the operational amplifier 14 and the output terminal of the impedance converter 16, and an impedance element capacitor 15 connected between the output terminal of the operational amplifier 14 and the input terminal of the impedance converter 16, wherein a capacitor 17 to be measured is connected between the input terminal of the impedance converter 16 and a predetermined potential.

公开(公告)号：EP0970386B1

公开(公告)日：2006-05-03

申请号：EP99900308.0

申请日：1999-01-14

申请人： TOKYO ELECTRON LIMITED ,  Hokuto Electronics, Inc.

发明人： Hiroshima, Tatsuo ,  NAKANO, Koichi ,  HARADA, Muneo ,  MATSUMOTO, Toshiyuki ,  HIROTA, Yoshihiro

IPC分类号： G01R27/26

CPC分类号： G01R27/2605

摘要： An impedance-to-voltage converter for converting an impedance of a target to a voltage is described which comprises an operational amplifier (OP), a coaxial cable consisting of a signal line and shielding element(s), and an AC signal generator. A feedback impedance circuit is connected between output and inverting terminals of the OP, and whereby a non-inverting terminal and the inverting terminal are an imaginal-short condition. One end of the signal line is connected to the inverting input terminal of the OP and the other end is connected to one electrode of the target and the AC signal generator is connected to the non-inverting input terminal of the OP. The shielding element comprises at least one shielding layer surrounding the signal line and is connected to the non-inverting input terminal of the OP, and thus the signal line and the shielding layer are the same voltage due to the imaginal-short of the input terminals of the OP, resulting in reduction of noise on the signal line.

公开(公告)号：EP1555535A4

公开(公告)日：2006-04-26

申请号：EP02777897

申请日：2002-10-22

申请人： TOKYO ELECTRON LTD ,  HOKUTO ELECTRONICS INC

发明人： YAKABE MASAMI ,  NAKANO KOICHI

IPC分类号： G01R27/26 ,  G01D5/24 ,  G01N27/22 ,  H04R3/06 ,  H04R19/04

CPC分类号： G01R27/26

公开(公告)号：EP1249706A2

公开(公告)日：2002-10-16

申请号：EP02252419.3

申请日：2002-04-03

申请人： Hokuto Electronics, Inc.

发明人： Nakano, Koichi, c/o Hokuto Electronics Incorp.

IPC分类号： G01R15/16

CPC分类号： G01R15/16 ,  G01R31/312

摘要： It is possible to avoid the effects of floating capacitance, and to measure a voltage with a simple operation and in a non-contact manner, without measuring the floating capacitance. A measurement method for measuring an AC voltage applied to a conductor, without contacting the conductor, using a detection probe (11), provided with a detection electrode (111) capable of covering part of a surface of insulation (SL) for insulating the conductor (CD) and a shield electrode (112) for covering the detection electrode, and an oscillator (12) for outputting a signal having a certain frequency, wherein one end of each of a core wire and a sheath wire of a shield cable are connected to the detection electrode and the shield electrode, and a floating capacitance effect is substantially made zero by establishing an imaginary short-circuit state between each of the other ends, the measurement method comprising the steps of measuring impedance between the detection electrode and the conductor by applying the signal from an oscillator to the detection electrode via the shield cable, measuring a current discharged from the detection electrode attributable to the voltage applied to the conductor, and obtaining the applied voltage based on the measured impedance and current.

摘要翻译： 它能够避免浮动电容的影响，并且以测量的电压与简单手术并以非接触的方式，而无需测量的浮动电容。 用于绝缘导体，用于测量探针施加到导体的交流电压，而不接触导体，使用检测（11）所述的测量方法，设置有检测电极（111）能够覆盖绝缘（SL）的表面的一部分的 （CD）和用于覆盖所述检测电极的屏蔽电极（112），以及振荡器（12），用于输出铃声具有一定频率的信号，worin各芯线的一端和屏蔽电缆的外鞘线材连接 于检测电极和屏蔽电极，以及浮置电容效应通过各自的另一端的之间假想短路状态的建立基本上为零，该测量方法，包括检测电极和所述导体通过之间测量阻抗的步骤 经由屏蔽电缆施加信号从振荡器到检测电极，测量从检测电极放电的电流属性能够在电压应用 到导体，以及基于所测量的阻抗和电流所施加的电压。

公开(公告)号：EP1219967B1

公开(公告)日：2007-07-25

申请号：EP01912131.8

申请日：2001-03-07

申请人： TOKYO ELECTRON LIMITED ,  Hokuto Electronics, Inc.

发明人： YAKABE, Masami ,  MATSUMOTO, Toshiyuki ,  HIROTA, Yoshihiro ,  NAKANO, Koichi

IPC分类号： G01R27/02 ,  G01R27/26 ,  G01D5/24

CPC分类号： G01R27/02

摘要： A second operational amplifier (11) of a core (1) has an inverting input terminal and an output terminal that are short-circuited. A signal line (19) is connected to the noninverting input terminal of the second operational amplifier. A capacitance sensor (18) is connected to the signal line (19). A first operational amplifier (12) has a noninverting input terminal grounded. The inverting input terminal of the first operational amplifier is connected to first and second resistors (15, 16) on one end. The other end of the first resistor (15) is connected to an AC voltage generator (14). The other end of the second resistor (16) is connected to the output terminal of the first operational amplifier (11). The core (1) has a signal output terminal (21) connected to an inverting amplifier (2). An addition device (3) is connected to an AC output terminal (22) of the core (1) and the inverted output terminal (42) of the inverting amplifier (2). The noninverting input terminals of the operational amplifiers (36, 40) is grounded.

公开(公告)号：EP0970386B8

公开(公告)日：2006-06-21

申请号：EP99900308.0

申请日：1999-01-14

申请人： TOKYO ELECTRON LIMITED ,  Hokuto Electronics, Inc.

发明人： Hiroshima, Tatsuo ,  NAKANO, Koichi ,  HARADA, Muneo ,  MATSUMOTO, Toshiyuki ,  HIROTA, Yoshihiro

IPC分类号： G01R27/26

CPC分类号： G01R27/2605

摘要： An impedance-to-voltage converter for converting an impedance of a target to a voltage is described which comprises an operational amplifier (OP), a coaxial cable consisting of a signal line and shielding element(s), and an AC signal generator. A feedback impedance circuit is connected between output and inverting terminals of the OP, and whereby a non-inverting terminal and the inverting terminal are an imaginal-short condition. One end of the signal line is connected to the inverting input terminal of the OP and the other end is connected to one electrode of the target and the AC signal generator is connected to the non-inverting input terminal of the OP. The shielding element comprises at least one shielding layer surrounding the signal line and is connected to the non-inverting input terminal of the OP, and thus the signal line and the shielding layer are the same voltage due to the imaginal-short of the input terminals of the OP, resulting in reduction of noise on the signal line.

摘要翻译： 描述了用于将目标的阻抗转换为电压的阻抗 - 电压转换器，其包括运算放大器（OP），由信号线和屏蔽元件组成的同轴电缆以及AC信号发生器。 反馈阻抗电路连接在OP的输出端和反相端之间，并且其中非反相端和反相端是成像短路条件。 信号线的一端连接到OP的反相输入端子，另一端连接到目标的一个电极，交流信号发生器连接到OP的同相输入端子。 屏蔽元件包括围绕信号线的至少一个屏蔽层并且连接到OP的非反相输入端子，因此信号线和屏蔽层由于输入端子的成像不足而具有相同的电压 的OP，从而减少信号线上的噪声。