发明公开
EP1254357A1 OPTICAL PRESSURE SENSOR 有权
光学压力传感器

OPTICAL PRESSURE SENSOR
摘要:
A pressure sensor (10) configured to sense an applied pressure, comprising a diaphragm support structure (12), a diaphragm (16A, B) coupled to the diaphragm support structure and configured to deflect in response to applied pressure, a moveable member (20) coupled to the diaphragm and configured to move in response to deflection of the diaphragm, and an optical interference element (34) coupled to the moveable member and configured to interfere with incident light, wherein the interference is a function of position of the moveable member.
公开/授权文献
信息查询
0/0