发明公开
- 专利标题: OPTICAL PRESSURE SENSOR
- 专利标题(中): 光学压力传感器
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申请号: EP01907147.1申请日: 2001-02-09
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公开(公告)号: EP1254357A1公开(公告)日: 2002-11-06
- 发明人: SITTLER, Fred, C. , WILLCOX, Charles, R. , RUD, Stanley, E., Jr.
- 申请人: ROSEMOUNT INC.
- 申请人地址: 12001 West 78th Street Eden Prairie, MN 55344 US
- 专利权人: ROSEMOUNT INC.
- 当前专利权人: ROSEMOUNT INC.
- 当前专利权人地址: 12001 West 78th Street Eden Prairie, MN 55344 US
- 代理机构: Cross, Rupert Edward Blount
- 优先权: US181866P 20000211
- 国际公布: WO01059419 20010816
- 主分类号: G01L9/00
- IPC分类号: G01L9/00 ; G01L11/02
摘要:
A pressure sensor (10) configured to sense an applied pressure, comprising a diaphragm support structure (12), a diaphragm (16A, B) coupled to the diaphragm support structure and configured to deflect in response to applied pressure, a moveable member (20) coupled to the diaphragm and configured to move in response to deflection of the diaphragm, and an optical interference element (34) coupled to the moveable member and configured to interfere with incident light, wherein the interference is a function of position of the moveable member.
公开/授权文献
- EP1254357B1 OPTICAL PRESSURE SENSOR 公开/授权日:2006-12-06
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