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3669 条记录 (耗时 0.021 秒)

    PRESSURE SENSOR, AND DISPENSING DEVICE
    7.
    发明公开
    PRESSURE SENSOR, AND DISPENSING DEVICE 审中-实审

    公开(公告)号：EP4386347A1

    公开(公告)日：2024-06-19

    申请号：EP22889707.0

    申请日：2022-10-03

    申请人： HITACHI HIGH-TECH CORPORATION

    发明人： YAMASAKI, Tatsuya ,  KANAMARU, Masatoshi ,  AONO, Takanori ,  SUZUKI, Yohichiroh ,  TAKAHASHI, Takuya ,  IKEDA, Hiroshi

    IPC分类号： G01L9/00

    CPC分类号： G01L9/00

    摘要： The objective of the present invention is to provide a pressure sensor having an improved effect of suppressing peeling of a pressure accepting portion such as a diaphragm. A pressure sensor 15 according to the present invention comprises a sensor enclosure 32 in which a first flow passage 33 and a second flow passage 35 that branches from the first flow passage 33 are formed, a sensor chip 31 which includes a diaphragm portion 31a provided so as to block the second flow passage 35, and which is joined to the sensor enclosure 32, a cap member 34 installed on the sensor chip 31 so as to cover the diaphragm portion 31a from the opposite side to the sensor enclosure 32, and a pressing member 60 for pressing the cap member 34 toward the sensor chip 31, wherein an inner circumference of a part of the cap member 34 that is placed on the sensor chip 31 is disposed so as to be positioned further toward the center of the diaphragm portion 31a than an inner circumference of a joint portion 36 of the sensor enclosure 32 and the sensor chip 31.