发明公开
EP1258918A1 ELECTROSTATIC CHUCK MEMBER AND METHOD OF PRODUCING THE SAME
有权
VERFAHREN ZU SEINER HERSTELLUNG的ELEKTROSTATISCHES SPANNFUTTERGLIED
- 专利标题： ELECTROSTATIC CHUCK MEMBER AND METHOD OF PRODUCING THE SAME
- 专利标题（中）： VERFAHREN ZU SEINER HERSTELLUNG的ELEKTROSTATISCHES SPANNFUTTERGLIED
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申请号： EP01901396.0申请日： 2001-01-17
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公开(公告)号： EP1258918A1公开(公告)日： 2002-11-20
- 发明人: HARADA, Yoshio , TAKEUCHI, Junichi , TOGOE, Kenichiro
- 申请人： TOCALO CO. LTD.
- 申请人地址： 13-4, Fukae-Kitamachi 4-chome, Higashinada-ku Kobe-shi, Hyogo 658-0013 JP
- 专利权人： TOCALO CO. LTD.
- 当前专利权人： TOCALO CO. LTD.
- 当前专利权人地址： 13-4, Fukae-Kitamachi 4-chome, Higashinada-ku Kobe-shi, Hyogo 658-0013 JP
- 代理机构： Giles, Ashley Simon
- 优先权： JP2000012818 20000121
- 国际公布： WO01054188 20010726
- 主分类号： H01L21/68
- IPC分类号： H01L21/68 ; B23Q3/15
摘要：
It is to provide an electrostatic chuck member having a strong adsorption force and an excellent responsibility (release property) in the stop of voltage application and is an electrostatic chuck member comprising a substrate, an undercoat of a metallic layer formed on at least one surface thereof, a lower insulating layer of Al 2 O 3 ceramic formed on the undercoat, a metallic electrode layer formed on the lower insulating layer and an upper insulating layer of Al 2 O 3 ceramic formed on the electrode layer as a topcoat.
公开/授权文献
- EP1258918B1 ELECTROSTATIC CHUCK MEMBER AND METHOD OF PRODUCING THE SAME 公开/授权日：2008-12-03
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