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    METHOD FOR MANUFACTURING SURFACE-MODIFIED MEMBER
    1.
    发明公开
    METHOD FOR MANUFACTURING SURFACE-MODIFIED MEMBER 审中-公开

    公开(公告)号：EP3327168A1

    公开(公告)日：2018-05-30

    申请号：EP16827566.7

    申请日：2016-06-27

    申请人： Tocalo Co., Ltd.

    发明人： YOKOTA,Hiroki ,  FUKUSHI,Tatsuya ,  SUIDZU,Tatsuo

    IPC分类号： C23C4/18 ,  C23C4/12 ,  H01L21/205 ,  H01L21/3065

    CPC分类号： C23C4/12 ,  C23C4/18 ,  C23C28/021 ,  C23C28/023 ,  C23C28/40 ,  H01L21/205 ,  H01L21/3065

    摘要： A method for producing a surface-modified component includes: a process of forming a thermal sprayed coating on a substrate; a process of irradiating a surface of the thermal sprayed coating with a high energy beam so as to cause an entirety of the thermal sprayed coating and a part of the substrate in a thickness direction to melt and then solidify, and thereby forming a densified modified layer; a process of forming a thermal sprayed coating on the modified layer which has been formed in the latest; and a process of irradiating a surface of the thermal sprayed coating with a high energy beam so as to cause an entirety of the thermal sprayed coating and a part of the modified layer which has been formed in the latest in the thickness direction to melt and then solidify, and thereby forming a densified modified layer.

    METHOD FOR ROUGHENING SUBSTRATE, METHOD FOR SURFACE-TREATING SUBSTRATE, METHOD FOR PRODUCING SPRAY-COATED MEMBER, AND SPRAY-COATED MEMBER
    2.
    发明公开
    METHOD FOR ROUGHENING SUBSTRATE, METHOD FOR SURFACE-TREATING SUBSTRATE, METHOD FOR PRODUCING SPRAY-COATED MEMBER, AND SPRAY-COATED MEMBER 审中-公开
    基板粗化方法，表面处理基板的制造方法，喷涂涂装部件的制造方法以及喷涂部件

    公开(公告)号：EP3287542A1

    公开(公告)日：2018-02-28

    申请号：EP16782917.5

    申请日：2016-03-23

    申请人： Tocalo Co., Ltd.

    发明人： YOKOTA,Hiroki ,  KAWAI,Daisuke ,  SUIDZU,Tatsuo

    IPC分类号： C23C4/02 ,  B23K26/00 ,  B23K26/352 ,  B32B18/00

    摘要： A ceramic substrate (2) is irradiated in an atmospheric air with a laser having a power density of 1.0 × 10 7 - 1.0 × 10 9 W/cm 2 for an action time on an irradiation area of 1.0 × 10 -7 - 1.0 × 10 -5 s to roughen a surface of the ceramic substrate (2), as well as to form an oxide layer (3) on a roughened surface (2a). This yields high adhesion to a thermal sprayed coating formed on the ceramic substrate (2), due to the action of chemical affinity in addition to physical adhesion force of the roughened surface (2a), without causing any great reduction in substrate strength.

    摘要翻译： 在照射面积为1.0×10-7-1.0×10-5s的作用时间内，用功率密度为1.0×107-1.0×109W / cm2的激光在大气中照射陶瓷基板（2）至 使陶瓷基板（2）的表面粗糙化，在粗糙面（2a）上形成氧化物层（3）。 除了粗糙化表面（2a）的物理粘附力之外，由于化学亲和力的作用，这对于在陶瓷基底（2）上形成的热喷涂涂层产生高附着力，而不引起基底强度的任何大的降低。

    ELECTROSTATIC CHUCK MEMBER AND METHOD OF PRODUCING THE SAME
    4.
    发明授权
    ELECTROSTATIC CHUCK MEMBER AND METHOD OF PRODUCING THE SAME 有权
    静电夹具及其制造方法四肢

    公开(公告)号：EP1258918B1

    公开(公告)日：2008-12-03

    申请号：EP01901396.0

    申请日：2001-01-17

    申请人： TOCALO CO. LTD.

    发明人： HARADA, Yoshio ,  TAKEUCHI, Junichi ,  TOGOE, Kenichiro

    IPC分类号： H01L21/68 ,  B23Q3/15

    CPC分类号： B23Q3/154 ,  H01L21/6833

    摘要： An electrostatic chuck member having a high adsorption force and superior in response performance (release property) when application of voltage is stopped, comprising an undercoat in the form of a metallic layer on at least one surface of a base member, a lower insulation layer of Al2O3 ceramics on the undercoat, a metallic electrode layer on the insulation layer, an upper insulation layer, which is a topcoat, of Al2O3 ceramics on the electrode layer.

    METHOD OF PRODUCTION OF SELF-FUSING ALLOY SPRAY COATING MEMBER
    5.
    发明授权
    METHOD OF PRODUCTION OF SELF-FUSING ALLOY SPRAY COATING MEMBER 有权
    用于生产SPRÜHBESCHICHTUNGSELEMENTES与自动熔炼

    公开(公告)号：EP0971046B1

    公开(公告)日：2004-04-14

    申请号：EP99900159.7

    申请日：1999-01-11

    申请人： TOCALO CO. LTD.

    发明人： HARADA, Yoshio ,  SHIN, Hidetoshi

    IPC分类号： C23C4/18 ,  C23C4/08 ,  C23C4/10

    CPC分类号： C23C4/18

    摘要： A method of producing a self-fusing alloy spray coating member comprising the steps of forming in advance a porous ceramic spray film as a top coat on the surface of a self-fusing alloy spray film formed on a substrate before the self-fusing alloy spray film is subjected to re-fusing treatment, heating the spray film in an atmosphere containing an inert gas controlled to 1 to 300 hPa or by radio frequency induction heating, removing then the ceramic spray film to expose the self-fusing alloy spray film. This member has a uniform film thickness, has small residual quantities of pores and oxide type impurities and has a firm and strong film.

    Piezo-electric substrate and manufacturing method of the same
    9.
    发明公开
    Piezo-electric substrate and manufacturing method of the same 有权
    Piezoelektrisches Substrat und Herstellungsverfahrendafür

    公开(公告)号：EP1885062A1

    公开(公告)日：2008-02-06

    申请号：EP07014595.8

    申请日：2007-07-25

    申请人： KOIKE CO., LTD. ,  TOCALO CO. LTD.

    发明人： Tamura, Noboru ,  Ichikawa, Nakaba ,  Takabatake, Takeshi ,  Yasuda, Kaname

    IPC分类号： H03H3/08 ,  H03H3/10 ,  H03H9/02

    CPC分类号： H03H9/02834 ,  H03H3/10 ,  H03H9/02574 ,  Y10T29/42

    摘要： A piezo-electric substrate 1 is mainly comprised of a base material 11, and a film 12 formed on one main surface of the base material 11. In the base material 11, the main surface on which the film 12 is formed is a roughed main surface 11a. The piezo-electric substrate 1 is obtained by forming the film 12 comprised of a material with a coefficient of linear expansion smaller than a coefficient of linear expansion of the base material 11 on the roughened main surface 11a using a thermal spraying method.

    摘要翻译： 压电基板1主要包括基材11和形成在基材11的一个主表面上的膜12.在基材11中，形成有膜12的主表面是粗糙的主体 表面11a。 压电基板1通过使用热喷涂法在粗糙化主表面11a上形成由线性膨胀系数小于基材11的线膨胀系数的材料构成的膜12而获得。

    ELECTROSTATIC CHUCK MEMBER AND METHOD OF PRODUCING THE SAME
    10.
    发明公开
    ELECTROSTATIC CHUCK MEMBER AND METHOD OF PRODUCING THE SAME 有权
    VERFAHREN ZU SEINER HERSTELLUNG的ELEKTROSTATISCHES SPANNFUTTERGLIED

    公开(公告)号：EP1258918A1

    公开(公告)日：2002-11-20

    申请号：EP01901396.0

    申请日：2001-01-17

    申请人： TOCALO CO. LTD.

    发明人： HARADA, Yoshio ,  TAKEUCHI, Junichi ,  TOGOE, Kenichiro

    IPC分类号： H01L21/68 ,  B23Q3/15

    CPC分类号： B23Q3/154 ,  H01L21/6833

    摘要： It is to provide an electrostatic chuck member having a strong adsorption force and an excellent responsibility (release property) in the stop of voltage application and is an electrostatic chuck member comprising a substrate, an undercoat of a metallic layer formed on at least one surface thereof, a lower insulating layer of Al 2 O 3 ceramic formed on the undercoat, a metallic electrode layer formed on the lower insulating layer and an upper insulating layer of Al 2 O 3 ceramic formed on the electrode layer as a topcoat.

    摘要翻译： 提供一种在施加电压停止时具有强吸附力和极好的责任（释放特性）的静电卡盘部件，并且是一种静电卡盘部件，其包括基板，在其至少一个表面上形成的金属层的底涂层 形成在底涂层上的下部绝缘层Al2O3陶瓷，形成在下绝缘层上的金属电极层和形成在作为顶涂层的电极层上的Al 2 O 3陶瓷的上绝缘层。