发明授权
- 专利标题: FLEXURAL PLATE WAVE SENSOR
- 专利标题(中): 弯曲波传感器
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申请号: EP01920576.4申请日: 2001-03-20
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公开(公告)号: EP1266214B1公开(公告)日: 2009-09-23
- 发明人: CUNNINGHAM, Brian, T.
- 申请人: THE CHARLES STARK DRAPER LABORATORY, INC.
- 申请人地址: 555 Technology Square Cambridge, MA 02139 US
- 专利权人: THE CHARLES STARK DRAPER LABORATORY, INC.
- 当前专利权人: THE CHARLES STARK DRAPER LABORATORY, INC.
- 当前专利权人地址: 555 Technology Square Cambridge, MA 02139 US
- 代理机构: Jones, Graham Henry
- 优先权: US531970 20000320
- 国际公布: WO2001071336 20010927
- 主分类号: G01N29/02
- IPC分类号: G01N29/02 ; H01L21/02
摘要:
A method for manufacturing a flexural plate wave sensor includes the steps of depositing an etch-stop layer (34) over a substrate (32), depositing a membrane layer (36) over the etch stop layer, depositing a piezoelectric layer (38) over the membrane layer, forming a first transducer (44) on the piezoelectric layer and forming a second transducer (48) on the piezoelectric layer, spaced from the first transducer. The method further includes the steps of etching a cavity (52) through the substrate, the cavity having substantially parallel interior walls (54a, 54b), removing the portion of the etch stop layer between the cavity and the membrane layer to expose a portion (53) of the membrane layer, and depositing an absorptive coating (56) on the exposed portion of the membrane layer.
公开/授权文献
- EP1266214A1 FLEXURAL PLATE WAVE SENSOR AND ARRAY 公开/授权日:2002-12-18
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