A method of manufacturing a ceramic multi-layer substrate, comprising a first process for manufacturing an unbaked composite laminated body (11) having a first contraction suppressing layer (13) and a second contraction suppressing layer (14) on one principal plane and the other principal plane of an unbaked multi-layer collecting substrate (12) formed of a plurality of ceramic green layers (17) stacked each other, a second process for forming cut-in grooves (16) reaching a part of the multi-layer collecting substrate (12) from the first contraction suppressing layer (13) side through the first contraction suppressing layer (13), a third process for baking the composite laminated body (11), a fourth process for removing the first and second contraction suppressing layers (13) and (14) and taking out the baked multi-layer collecting substrate (11), and a fifth process for taking out a plurality of ceramic multi-layer substrates by dividing the multi-layer collecting substrate along the cut-in grooves (16), whereby the ceramic multi-layer substrate with high dimensional accuracy and high reliability can be provided with high productivity by suppressing the contraction thereof in flat surface direction at the time of baking.