发明公开
EP1330859A4 SMART LASER WITH FAST DEFORMABLE GRATING
有权
INTELLIGENTER LASER MIT SCHNELLEM DEFORMIERBAREM GITTER
- 专利标题: SMART LASER WITH FAST DEFORMABLE GRATING
- 专利标题(中): INTELLIGENTER LASER MIT SCHNELLEM DEFORMIERBAREM GITTER
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申请号: EP01273238申请日: 2001-10-05
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公开(公告)号: EP1330859A4公开(公告)日: 2005-04-13
- 发明人: FOMENKOV IGOR V , ERIE FREDERICK G , BUCK JESSE D , DAS PALASH P
- 申请人: CYMER INC
- 专利权人: CYMER INC
- 当前专利权人: CYMER INC
- 优先权: US70331700 2000-10-31
- 主分类号: H01S3/225
- IPC分类号: H01S3/225 ; G02B5/18 ; G02B27/44 ; G03F7/20 ; H01S3/03 ; H01S3/034 ; H01S3/08 ; H01S3/081 ; H01S3/086 ; H01S3/13 ; H01S3/134 ; H01S3/137 ; H01S3/139 ; H01S3/10
摘要:
A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage, wavelength by controlling the position of an RMAX mirror and bandwidth is controlled by adjusting the curvature of a grating (82) to shapes more complicated than simple convex or simple concave. A preferred embodiment provides seven piezoelectric driven pressure-tension locations(84) on the back side of the grating(82) at 5 horizontal locations to produce shapes such as S shapes, W shapes and twisted shapes. Preferred embodiment include automatic feedback control of horizontal and vertical beam profile by automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the RMAX tilt.
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