发明公开
EP1330859A4 SMART LASER WITH FAST DEFORMABLE GRATING 有权
INTELLIGENTER LASER MIT SCHNELLEM DEFORMIERBAREM GITTER

SMART LASER WITH FAST DEFORMABLE GRATING
摘要:
A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage, wavelength by controlling the position of an RMAX mirror and bandwidth is controlled by adjusting the curvature of a grating (82) to shapes more complicated than simple convex or simple concave. A preferred embodiment provides seven piezoelectric driven pressure-tension locations(84) on the back side of the grating(82) at 5 horizontal locations to produce shapes such as S shapes, W shapes and twisted shapes. Preferred embodiment include automatic feedback control of horizontal and vertical beam profile by automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the RMAX tilt.
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