发明公开
- 专利标题: MEASUREMENT OF SURFACE DEFECTS
- 专利标题(中): Easurement表面缺陷
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申请号: EP01993826.5申请日: 2001-11-08
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公开(公告)号: EP1336094A2公开(公告)日: 2003-08-20
- 发明人: TUKKER, Teunis, W. , 'T HOOFT, Gert, W.
- 申请人: Koninklijke Philips Electronics N.V.
- 申请人地址: Groenewoudseweg 1 5621 BA Eindhoven NL
- 专利权人: Koninklijke Philips Electronics N.V.
- 当前专利权人: Koninklijke Philips Electronics N.V.
- 当前专利权人地址: Groenewoudseweg 1 5621 BA Eindhoven NL
- 代理机构: Deguelle, Wilhelmus Hendrikus Gerardus
- 优先权: EP00203979 20001113
- 国际公布: WO02039099 20020516
- 主分类号: G01N21/95
- IPC分类号: G01N21/95
摘要:
A device (1) for the inspection of one or a plurality of moving surfaces (8), more particularly for the inspection of a rotating surface (8) of a silicon wafer (13). The device comprises at least a laser light source (1) and a beam splitter (4) for splitting a light beam (2) that is emitted by said light source (1) into at least two sub-beams (5, 6) that interfere with one another so as to produce an interference pattern (10) on the surface (8) to be inspected. The device is arranged so that the interference pattern (10) contains a plurality of lines (11) of maximum intensity and lines (12) of minimum intensity, said lines extending essentially transversely of the direction of movement of the surface (8).
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