SPHERICAL ABERRATION DETECTOR
    1.
    发明公开
    SPHERICAL ABERRATION DETECTOR 审中-公开
    探测器球面像差

    公开(公告)号:EP1891635A2

    公开(公告)日:2008-02-27

    申请号:EP06744996.7

    申请日:2006-05-22

    IPC分类号: G11B7/135

    摘要: An optical scanning device (1) for scanning at least one information layer (2) of at least one optical record carrier (3). The device includes a radiation source (7) for providing at least a first radiation beam (4) comprising a first wavelength, an objective lens system (8) for converging the first radiation beam on a respective information layer (2), an information detector (23) for detecting at least a portion of the first radiation beam (22) reflected from the respective information layer, for determining information on said layer, and a spherical aberration detection system. The spherical aberration detection system includes an aberration detector (24) for detecting at least a portion of the reflected first radiation beam for determining spherical aberration of the first radiation beam, and a diffractive element (26) for diffracting at least a portion of the reflected first radiation beam towards the aberration detector (24), and for transmitting at least a portion of the reflected first radiation beam towards the information detector (23). In a first mode of operation the grating is arranged to introduce a phase change to an incident portion of a radiation beam for transmitting that portion towards the information detector (23). In a second mode of operation the grating is arranged to introduce a phase change to an incident portion of the reflected first radiation beam for diffracting that portion towards the aberration detector (24).

    OPTICAL RECORD CARRIER SCANNING DEVICE
    2.
    发明公开
    OPTICAL RECORD CARRIER SCANNING DEVICE 有权
    扫描设备光记录介质

    公开(公告)号:EP1730735A1

    公开(公告)日:2006-12-13

    申请号:EP05709022.7

    申请日:2005-03-16

    IPC分类号: G11B7/135

    CPC分类号: G11B7/1353 G11B2007/0006

    摘要: An optical scanning device for scanning optical record carriers having information layers at different information layer depths within the carrier, the optical record carriers including a first optical record carrier (3’) having an information layer (2’) at a first information layer depth d1, a second optical record carrier (3’’) having an information layer (2’’) at a second information layer depth d2 and a third optical record carrier (3’’’) having an information layer (2’’’) at a third information layer depth d3, wherein d3

    OPTICAL SCANNING DEVICE
    4.
    发明公开
    OPTICAL SCANNING DEVICE 有权
    光学扫描装置

    公开(公告)号:EP1554723A1

    公开(公告)日:2005-07-20

    申请号:EP03808783.9

    申请日:2003-09-15

    IPC分类号: G11B7/14

    摘要: An optical head for use in the scanning of a record carrier, the record carrier having data stored on data tracks therein on a plurality of information layers (3, 4) at a plurality of depths within the record carrier. The optical head comprises: a movable optical element (16) arranged in an optical path to act upon a first radiation beam (12) and a second radiation beam (14) to provide the beams with a different displacement perpendicular to the optical path; and a lens system for focusing said first beam (12) at a first focal point (A) on a first information layer (3) of the record carrier and the focusing of the second beam (14) at a second different focal point (B) on a second information layer (4), wherein a spacing, transverse to the data tracks, between said first and second focal points (A, B) is controllable by varying the configuration of the movable optical element.

    摘要翻译: 一种用于扫描记录载体的光学头,所述记录载体具有存储在所述记录载体内的多个深度处的多个信息层(3,4)上的数据轨道上的数据。 该光学头包括:可移动光学元件(16),其布置在光路中以作用于第一辐射光束(12)和第二辐射光束(14),以提供具有垂直于光路的不同位移的光束; 以及用于将所述第一光束(12)聚焦在所述记录载体的第一信息层(3)上的第一焦点(A)处并且将所述第二光束(14)聚焦在第二不同焦点(B)处的透镜系统 )置于第二信息层(4)上,其中通过改变可移动光学元件的配置可控制所述第一和第二焦点(A,B)之间横向于数据轨道的间隔。

    MEASUREMENT OF SURFACE DEFECTS
    5.
    发明公开
    MEASUREMENT OF SURFACE DEFECTS 审中-公开
    Easurement表面缺陷

    公开(公告)号:EP1336094A2

    公开(公告)日:2003-08-20

    申请号:EP01993826.5

    申请日:2001-11-08

    IPC分类号: G01N21/95

    CPC分类号: G01N21/9501

    摘要: A device (1) for the inspection of one or a plurality of moving surfaces (8), more particularly for the inspection of a rotating surface (8) of a silicon wafer (13). The device comprises at least a laser light source (1) and a beam splitter (4) for splitting a light beam (2) that is emitted by said light source (1) into at least two sub-beams (5, 6) that interfere with one another so as to produce an interference pattern (10) on the surface (8) to be inspected. The device is arranged so that the interference pattern (10) contains a plurality of lines (11) of maximum intensity and lines (12) of minimum intensity, said lines extending essentially transversely of the direction of movement of the surface (8).

    OPTICAL SCANNING DEVICE
    7.
    发明授权
    OPTICAL SCANNING DEVICE 有权
    光学扫描设备

    公开(公告)号:EP1554723B1

    公开(公告)日:2009-04-01

    申请号:EP03808783.9

    申请日:2003-09-15

    IPC分类号: G11B7/14

    摘要: An optical head for use in the scanning of a record carrier, the record carrier having data stored on data tracks therein on a plurality of information layers (3, 4) at a plurality of depths within the record carrier. The optical head comprises: a movable optical element (16) arranged in an optical path to act upon a first radiation beam (12) and a second radiation beam (14) to provide the beams with a different displacement perpendicular to the optical path; and a lens system for focusing said first beam (12) at a first focal point (A) on a first information layer (3) of the record carrier and the focusing of the second beam (14) at a second different focal point (B) on a second information layer (4), wherein a spacing, transverse to the data tracks, between said first and second focal points (A, B) is controllable by varying the configuration of the movable optical element.

    OPTICAL SCANNING DEVICE
    9.
    发明授权

    公开(公告)号:EP1831884B1

    公开(公告)日:2008-04-30

    申请号:EP05825461.6

    申请日:2005-12-15

    IPC分类号: G11B7/135 G02B3/02 G02B3/12

    摘要: An optical scanning device for scanning optical record carriers having cover layers of different thicknesses. The scanning device has a first mode for scanning a first optical record carrier, a second mode for scanning a second optical record carrier and a third mode for scanning third optical record carrier. The device comprises an objective lens system and a switchable optical element having a first discrete state and a different, second discrete state. The element comprises: a fluid system including a first fluid and a different, second fluid (19) ; a wavefront modifier (17) ; and a fluid system switch for acting on the fluid system to switch between the first and second discrete states of the element. When the element is in the first discrete state, the wavefront modifier (17) is substantially covered by the first fluid, and when the element is in the second discrete state, the wavefront modifier (17) is substantially covered by the second fluid (19) . The wavefront modifier includes a non-periodic phase structure including a plurality of stepped annular zones separated by steps, the zones forming a non-periodic radial pattern, and is characterized in that the wavefront modifier further includes an aspherical surface. The scanning device is arranged to operate using the element in the second state to generate spherical aberration when in the second mode, the aspherical surface of the element in the second state compensating for more than half of the spherical aberration due to the objective lens system and second record carrier in combination.