发明公开
- 专利标题: A PROBE APPARATUS AND METHOD FOR EXAMINING A SAMPLE
- 专利标题(中): 设备和方法用于检查样品
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申请号: EP02716202.3申请日: 2002-01-30
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公开(公告)号: EP1356263A2公开(公告)日: 2003-10-29
- 发明人: COLE, Bryan Edward,Teraview Limited
- 申请人: Teraview Limited
- 申请人地址: 302/304 Cambridge Science ParkMilton Road Cambridge,Cambridgeshire CB4 0WG GB
- 专利权人: Teraview Limited
- 当前专利权人: Teraview Limited
- 当前专利权人地址: 302/304 Cambridge Science ParkMilton Road Cambridge,Cambridgeshire CB4 0WG GB
- 代理机构: Granleese, Rhian Jane
- 优先权: GB0102345 20010130
- 国际公布: WO02061398 20020808
- 主分类号: G01N21/00
- IPC分类号: G01N21/00
摘要:
A probe for examining a sample (5), the probe comprising an emitter (1) for emitting radiation, a detector (1) for detecting radiation and a dielectric member (3) configured to direct radiation from the emitter (1) to the sample (5) and to direct radiation reflected by the sample (5) to the detector (1), wherein in use, the dielectric member (3) occupies at least half of the radiation path length from the emitter (1) to the sample (5) to the detector (1).
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