METHOD AND SYSTEM FOR MEASURING COATING THICKNESS

    公开(公告)号:EP4325205A3

    公开(公告)日:2024-08-07

    申请号:EP23217411.0

    申请日:2018-01-26

    申请人: Teraview Limited

    IPC分类号: G01B11/06 G01B11/02 G01B17/00

    摘要: A method for determining the thickness of a plurality of coating layers, the method comprising:
    performing a calibration analysis on calibration data to determine initial values and search limits of optical parameters of said plurality of coating layers,
    irradiating the said plurality of layers with a pulse of THz radiation, said pulse comprising a plurality of frequencies in the range from 0.01 THz to 10 THz;
    detecting the reflected radiation to produce a sample response said sample response being derived from the reflected radiation;
    producing a synthesised waveform using the optical parameters and predetermined initial thicknesses of said layers; and
    varying said thicknesses and varying said optical parameters within the said search limits to minimise the error measured between the sample response and the synthesised waveform; and
    outputting the thicknesses of the layers.

    METHOD AND APPARATUS FOR INVESTIGATING A NON-PLANAR SAMPLE
    4.
    发明公开
    METHOD AND APPARATUS FOR INVESTIGATING A NON-PLANAR SAMPLE 审中-公开
    方法及装置研究的非平面探头的

    公开(公告)号:EP1660867A1

    公开(公告)日:2006-05-31

    申请号:EP04768240.6

    申请日:2004-08-27

    申请人: Teraview Limited

    IPC分类号: G01N21/49

    摘要: Method and apparatus for investigating a sample particularly a pharmaceutical tablet. An emitter and/or the sample are initially positioned so that the emitter is at a predetermined distance and normal angle to a first point on a surface of the sample. The emitter then irradiates the sample with radiation having a plurality of frequencies in the range from 25GHz to 100THz at a plurality of points on the surface of the sample. Relative motion is possible between the emitter and the sample so that the surface of the sample can be tracked to maintain the predetermined distance and normal angle at each of the plurality of points, and allow radiation transmitted and/or reflected from the sample at the plurality of points to be detected. This has particular application to imaging the structure or composition of a coating on a pharmaceutical tablet.

    APPARATUS AND METHOD FOR INVESTIGATING A SAMPLE
    6.
    发明公开
    APPARATUS AND METHOD FOR INVESTIGATING A SAMPLE 审中-公开
    装置和方法用于分析样品

    公开(公告)号:EP1352287A2

    公开(公告)日:2003-10-15

    申请号:EP02732144.7

    申请日:2002-01-16

    申请人: Teraview Limited

    IPC分类号: G02B26/10 G01N21/35

    摘要: An apparatus for investigating a sample comprising a source of a beam of radiation, a detector for detecting a beam of radiation reflected by or transmitted through a sample to be imaged, an optical subsystem for manipulating the beam between the source and detector and means for translating the optical subsystem along a first translation axis relative to the source and detector to scan the beam across the sample, wherein the source and the detector are on opposite sides of the subsystem and the beam from the source and the beam reflected or transmitted each enter and exit the subsystem in a direction parallel to the first direction of translation. The apparatus is also suitable for maintaining the relative phase of two beams of radiation, during translation of an optical subsystem.

    A TEST SYSTEM
    7.
    发明公开
    A TEST SYSTEM 审中-公开

    公开(公告)号:EP3391065A1

    公开(公告)日:2018-10-24

    申请号:EP16828960.1

    申请日:2016-12-16

    申请人: Teraview Limited

    IPC分类号: G01R31/28 G01R31/308

    摘要: A test system for testing a device having a plurality of electrical contacts. The test system comprising: a device table operable to hold at least one device under test, a probe comprising at least one probe end for contacting electrical contacts of a device under test, a movement mechanism operable to move one or both of the device table and the probe so as to bring the at least one probe end into contact with at least one electrical contact of a device under test, and a profile determining system configured to determine a profile of the electrical contacts of a device under test.

    AN IMAGING APPARATUS AND METHOD
    8.
    发明授权
    AN IMAGING APPARATUS AND METHOD 有权
    DEVICE AND METHOD FOR IMAGING

    公开(公告)号:EP1269156B1

    公开(公告)日:2009-09-09

    申请号:EP01907935.9

    申请日:2001-02-28

    申请人: Teraview Limited

    IPC分类号: G01N21/49 G01N21/35 G01N21/31

    CPC分类号: G01N21/4795 G01N21/3581

    摘要: An apparatus and method for imaging a sample, the apparatus comprising: a source for irradiating a sample with a beam of substantially continuous electromagnetic radiation having a frequency in the range 25GHz to 100THz; means for subdividing an area of the sample which is to be imaged into a two dimensional array of pixels; means for detecting radiation from each pixel wherein the detector is configured to detect a phase dependent quantity of the detected radiation which is measured relative to the radiation which irradiates the sample.

    A PROBE APPARATUS AND METHOD FOR EXAMINING A SAMPLE
    10.
    发明公开
    A PROBE APPARATUS AND METHOD FOR EXAMINING A SAMPLE 审中-公开
    设备和方法用于检查样品

    公开(公告)号:EP1356263A2

    公开(公告)日:2003-10-29

    申请号:EP02716202.3

    申请日:2002-01-30

    申请人: Teraview Limited

    IPC分类号: G01N21/00

    CPC分类号: G01N21/3581

    摘要: A probe for examining a sample (5), the probe comprising an emitter (1) for emitting radiation, a detector (1) for detecting radiation and a dielectric member (3) configured to direct radiation from the emitter (1) to the sample (5) and to direct radiation reflected by the sample (5) to the detector (1), wherein in use, the dielectric member (3) occupies at least half of the radiation path length from the emitter (1) to the sample (5) to the detector (1).