发明公开
EP1359622A1 SEMICONDUCTOR STORAGE DEVICE AND ITS MANUFACTURING METHOD
审中-公开
HERBLEITERSPEICHERBAUSTEIN UND VERFAHREN ZU SEINER HERSTELLUNG
- 专利标题: SEMICONDUCTOR STORAGE DEVICE AND ITS MANUFACTURING METHOD
- 专利标题(中): HERBLEITERSPEICHERBAUSTEIN UND VERFAHREN ZU SEINER HERSTELLUNG
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申请号: EP01273090.9申请日: 2001-12-28
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公开(公告)号: EP1359622A1公开(公告)日: 2003-11-05
- 发明人: OGAWA, Hisashi , MORI, Yoshihiro , TSUZUMITANI, Akihiko
- 申请人: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- 申请人地址: 1006, Oaza-Kadoma Kadoma-shi, Osaka 571-8501 JP
- 专利权人: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- 当前专利权人: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- 当前专利权人地址: 1006, Oaza-Kadoma Kadoma-shi, Osaka 571-8501 JP
- 代理机构: Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
- 优先权: JP2001000409 20010105
- 国际公布: WO02056383 20020718
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L21/8242
摘要:
A memory cell in a DRAM, which is a semiconductor memory device, is provided with a bit line 21a connected to a bit line plug 20b and a local interconnect 21b , over a first interlevel insulating film 18 . A conductor sidewall 40 of TiAIN is formed on side faces of hard mask 37, upper barrier metal 36, Pt film 35 and BST film 34. No contact hole is provided on the Pt film 35 constituting an upper electrode 35a . The upper electrode 35a is connected to an upper interconnect (a Cu interconnect 42 ) via the conductor sidewall 40 , dummy lower electrode 33b , dummy cell plug 30 and local interconnect 21b . The Pt film 35 is not exposed to a reducing atmosphere, and therefore deterioration in characteristics of the capacitive insulating film 34a can be prevented.
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