发明公开
EP1371090A1 HYBRID LOW-k INTERCONNECT STRUCTURE COMPRISED OF 2 SPIN-ON DIELECTRIC MATERIALS
审中-公开
与低K介电AUFSCHLEUDERMATERIALIEN OFF 2混合结构的复合
- 专利标题: HYBRID LOW-k INTERCONNECT STRUCTURE COMPRISED OF 2 SPIN-ON DIELECTRIC MATERIALS
- 专利标题(中): 与低K介电AUFSCHLEUDERMATERIALIEN OFF 2混合结构的复合
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申请号: EP01990106.5申请日: 2001-12-10
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公开(公告)号: EP1371090A1公开(公告)日: 2003-12-17
- 发明人: GATES, Stephen, McConnell , HEDRICK, Jeffrey, Curtis , NITTA, Satyanarayana, V. , PURUSHOTHAMAN, Sampath , TYBERG, Christy, Sensenich
- 申请人: International Business Machines Corporation
- 申请人地址: New Orchard Road Armonk, NY 10504 US
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: New Orchard Road Armonk, NY 10504 US
- 代理机构: Ling, Christopher John
- 优先权: US795429 20010228
- 国际公布: WO02071468 20020912
- 主分类号: H01L21/4763
- IPC分类号: H01L21/4763 ; H01L23/48
摘要:
A metal wiring plus low-k dielectric interconnect structure of the dual damascene-type is provided wherein the conductive metal lines and vias are built into a hybrid low-k dielectric which includes two spun-on dielectrics that have different atomic compositions and at least one of the two spun-on dielectrics is porous. The two spun-on dielectrics used in forming the inventive hybrid low-k dielectric each have a dielectric constant of about 2.6 or less, preferably each dielectric of the hybrid structure has a k of from about 1.2 to about 2.2. By utilizing the inventive hybrid low-k dielectric excellent control over metal line resistance (trench depth) is obtained, without no added cost. This is achieved without the use of a buried etch stop layer, which if present, would be formed between the two spun-on dielectrics. Moreover, the spun-on dielectrics of the hybrid low-k dielectric have distinctly different atomic compositions enabling control over the conductor resistance using the bottom spun-on dielectric (i.e., via dielectric) as an inherent etch stop layer for the upper spun-on dielectric (i.e., line dielectric).
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