- 专利标题： System for transporting substrate carriers
-
申请号： EP03255404.0申请日： 2003-08-29
-
公开(公告)号： EP1394840A3公开(公告)日： 2004-12-08
- 发明人: Rice, Michael R , Hudgens, Jeffrey C. , Englhardt, Eric A. , Lowrance, Robert B. , Elliott, Martin R.
- 申请人： Applied Materials, Inc.
- 申请人地址： P.O. Box 450A Santa Clara, California 95052 US
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： P.O. Box 450A Santa Clara, California 95052 US
- 代理机构： Bayliss, Geoffrey Cyril
- 优先权： US407451P 20020831
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H01L21/68 ; B65G49/07
摘要：
In a semiconductor fabrication facility, a conveyor (12) transports substrates carriers (14). The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism (32) lifts the substrate carriers (14) from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.
公开/授权文献
- EP1394840B1 System for transporting substrate carriers 公开/授权日：2008-11-19
信息查询
IPC分类:
