公开(公告)号：EP3899087B1

公开(公告)日：2024-11-27

申请号：EP19898242.3

申请日：2019-10-25

Inventor： DOSHAY, Sage Toko Garrett ,  MEYER TIMMERMAN THIJSSEN, Rutger ,  GODET, Ludovic ,  ZHU, Mingwei ,  ARGAMAN, Naamah ,  MCMILLAN, Wayne ,  KRISHNAN, Siddarth

IPC: H01L21/66 ,  H01L21/306 ,  H01L21/67

公开(公告)号：EP4430658A1

公开(公告)日：2024-09-18

申请号：EP22893458.4

申请日：2022-10-21

Applicant: Applied Materials, Inc.

Inventor： WANG, Chongyang C.

IPC: H01L21/67 ,  G05B19/418 ,  C23C16/44

CPC classification number: G05B19/41865 ,  G06Q10/06 ,  G05B2219/4503120130101

公开(公告)号：EP4430533A1

公开(公告)日：2024-09-18

申请号：EP22893452.7

申请日：2022-10-14

Applicant: Applied Materials, Inc.

Inventor： ADERHOLD, Wolfgang ,  AXELROD, Boris ,  SHAPOSHNIKOV, Maxim ,  RAMACHANDRAN, Dayal ,  MARATH SANKARATHODI, Bindusagar

IPC: G06N20/00 ,  H01L21/67

CPC classification number: G05B19/41865 ,  G05B2219/3236520130101 ,  G05B2219/4503120130101 ,  G05B2219/3209620130101 ,  G06N20/00

公开(公告)号：EP4423800A1

公开(公告)日：2024-09-04

申请号：EP22888049.8

申请日：2022-10-25

Applicant: Applied Materials Inc;

Inventor： HARRIS, Randy, A. ,  GROVE, Coby, Scott ,  WIRTH, Paul, Zachary ,  SHANTARAM, Avinash ,  YILMAZ, Alpay ,  NISSAN, Amir ,  BHIMJIYANI, Jitendra Ratilal ,  PINGLE, Niranjan ,  DICAPRIO, Vincent

IPC: H01L21/67 ,  H01L23/00 ,  H01L21/687

CPC classification number: H01L21/67184 ,  H01L21/67173 ,  H01L21/67161 ,  H01L21/67766 ,  H01L21/6836 ,  H01L2221/6832720130101

公开(公告)号：EP4423790A1

公开(公告)日：2024-09-04

申请号：EP22887905.2

申请日：2022-09-27

Applicant: Applied Materials, Inc.

Inventor： SUN, Dawei ,  HALL, Daniel

IPC: H01J37/20 ,  H01L21/683 ,  H01J37/317

CPC classification number: H01L21/6831 ,  H01L21/68721 ,  H01L21/67115 ,  H01L21/67248 ,  H01L21/68742 ,  H01L21/67103

公开(公告)号：EP4416768A1

公开(公告)日：2024-08-21

申请号：EP22881583.3

申请日：2022-10-07

Applicant: Applied Materials, Inc.

Inventor： KHOURY, Michel ,  SOMESHWAR, Ria

IPC: H01L33/00 ,  H01L33/20 ,  H01L33/32

CPC classification number: H01L33/007 ,  H01L33/32 ,  H01L21/0254 ,  H01L33/20 ,  H01L21/02458 ,  H01L21/02639 ,  H01L21/02647 ,  H01L21/0262 ,  H01L21/0242 ,  H01L21/02439

公开(公告)号：EP4416756A1

公开(公告)日：2024-08-21

申请号：EP22881584.1

申请日：2022-10-07

Applicant: Applied Materials, Inc.

Inventor： KHOURY, Michel ,  SOMESHWAR, Ria

IPC: H01L21/02

CPC classification number: H01L33/007 ,  H01L33/32 ,  H01L33/12 ,  H01L33/20 ,  H01L21/02458 ,  H01L21/02439 ,  H01L21/0254 ,  H01L21/02658 ,  H01L21/02488 ,  H01L21/02502

公开(公告)号：EP4416539A1

公开(公告)日：2024-08-21

申请号：EP22881546.0

申请日：2022-09-22

Applicant: Applied Materials, Inc.

Inventor： YANG, Jianji ,  BHARGAVA, Samarth ,  SELL, David

IPC: G02B5/18 ,  G02B1/10 ,  G02B6/00

CPC classification number: G02B5/1819 ,  G02B5/1857

公开(公告)号：EP3969959B1

公开(公告)日：2024-08-14

申请号：EP20806244.8

申请日：2020-05-13

IPC: G02B5/18 ,  G03F7/00 ,  G02B27/01

CPC classification number: G03F7/0005 ,  G03F7/0035 ,  G02B27/0172 ,  G02B2027/017420130101 ,  G02B5/1857

公开(公告)号：EP4394486A3

公开(公告)日：2024-08-07

申请号：EP24176444.8

申请日：2019-07-01

Applicant: Applied Materials, Inc.

Inventor： EVANS, Morgan ,  MEYER TIMMERMAN THIJSSEN, Rutger

IPC: G02B5/18 ,  G02B27/01

CPC classification number: G02B5/1857 ,  G02B6/0016 ,  G02B6/0038 ,  G02B27/0172 ,  G02B2027/017420130101

Abstract: An optical device is disclosed. The optical device includes a substrate having an optically transparent grating layer disposed thereon, a recess formed in the grating layer, the recess having a depth that changes from a first end of the recess to a second end of the recess, and a plurality of slanted grating structures formed in the grating layer below the recess and partially defining a portion of the recess. A depth of the plurality of slanted grating structures changes from the first end to the second end, and an angle of each of the plurality of slanted grating structures relative to a plane normal to the substrate is between about 25 degrees and 45 degrees.