发明授权
EP1415018B1 VERBUNDMATERIAL AUS EINEM SUBSTRATMATERIAL UND EINEM BARRIERESCHICHTMATERIAL
有权
COMPOSITE从衬底材料和涂层材料
- 专利标题: VERBUNDMATERIAL AUS EINEM SUBSTRATMATERIAL UND EINEM BARRIERESCHICHTMATERIAL
- 专利标题(英): Composite material made from a substrate material and a barrier layer material
- 专利标题(中): COMPOSITE从衬底材料和涂层材料
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申请号: EP02762433.7申请日: 2002-08-07
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公开(公告)号: EP1415018B1公开(公告)日: 2008-10-15
- 发明人: BEHLE, Stephan , KLIPPE, Lutz , BICKER, Matthias , WALTHER, Marten
- 申请人: Schott AG
- 申请人地址: Hattenbergstrasse 10 55122 Mainz DE
- 专利权人: Schott AG
- 当前专利权人: Schott AG
- 当前专利权人地址: Hattenbergstrasse 10 55122 Mainz DE
- 代理机构: Herden, Andreas F.
- 优先权: DE10139305 20010807
- 国际公布: WO2003014415 20030220
- 主分类号: C23C16/515
- IPC分类号: C23C16/515 ; C23C16/30 ; C23C16/40 ; B65D65/42
摘要:
The invention relates to a composite material with a substrate material and at least one barrier coating on one side of the substrate material. The invention is characterised in that the barrier coating is applied to the substrate material by means of plasma impulse chemical vapour deposition (PICVD) and the barrier layer comprises at least one of the following materials: SiOx with x ELEMENT [0.2], TiOx with x ELEMENT [0.2], amorphous hydrocarbons, electrically conducting layers, SnOx with x ELEMENT [0.2], SixNy with x ELEMENT [0.3], y ELEMENT [0.4], NbxOy with x ELEMENT [0.2], y ELEMENT [0.5], AlxOy with x ELEMENT [0.2], y ELEMENT [0.3].
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