LOCHERZEUGUNG MIT MEHRFACH-ELEKTRODEN
    6.
    发明公开
    LOCHERZEUGUNG MIT MEHRFACH-ELEKTRODEN 审中-公开
    带有多个电极HOLE生产

    公开(公告)号:EP2588284A1

    公开(公告)日:2013-05-08

    申请号:EP11730579.7

    申请日:2011-07-04

    申请人: Schott AG

    IPC分类号: B26F1/28

    摘要: An apparatus for producing holes in dielectric workpieces in the form of thin sheets and substrates, in particular of glass or glass-like materials and semiconductors is provided. The apparatus includes individual high-voltage electrodes that are symmetrically arranged on an electrode holder around the hole to be produced in the workpiece. The apparatus also includes individual counter electrodes that are arranged on a counter electrode holder. The electrodes and counter electrodes can be connected in a permutating manner to a high-voltage source for the discharge of high-voltage flashovers.