发明公开
- 专利标题: Semiconductor chip stack and method for manufacturing the same
- 专利标题(中): 半导体奇普·斯塔克,并处理它的制备
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申请号: EP03029014.2申请日: 2003-12-16
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公开(公告)号: EP1432032A3公开(公告)日: 2013-05-22
- 发明人: Yamazaki, Shunpei , Takayama, Toru , Maruyama, Junya , Ohno, Yumiko
- 申请人: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- 申请人地址: 398 Hase Atsugi-shi, Kanagawa-ken 243-0036 JP
- 专利权人: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- 当前专利权人: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- 当前专利权人地址: 398 Hase Atsugi-shi, Kanagawa-ken 243-0036 JP
- 代理机构: Grünecker, Kinkeldey, Stockmair & Schwanhäusser
- 优先权: JP2002368947 20021219
- 主分类号: H01L25/065
- IPC分类号: H01L25/065 ; H01L23/373 ; H01L21/683 ; H01L21/98 ; H01L27/12
摘要:
A semiconductor chip having a plurality of device formative layers that are formed into an integrated thin film is provided by a technique for transferring. According to the present invention, a semiconductor chip that is formed into a thin film and that is highly integrated can be manufactured by transferring a device formative layer (501) with a thickness of at most 50µm which is separated from a substrate (322) into another substrate by a technique for transferring, and transferring another device formative layer with a thickness of at most 50µm which is separated from another substrate to the above device formative layers, and, repeating such transferring process.
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