发明公开
EP1447838A2 System and method to reduce the effect of reactive forces on a stage using a balance mass
审中-公开
装置和方法，以减少在载体平台上的反作用力，使用平衡质量
- 专利标题： System and method to reduce the effect of reactive forces on a stage using a balance mass
- 专利标题（中）： 装置和方法，以减少在载体平台上的反作用力，使用平衡质量
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申请号： EP04002962.1申请日： 2004-02-10
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公开(公告)号： EP1447838A2公开(公告)日： 2004-08-18
- 发明人: Carter, Frederick Michael , Stenabaugh, Donald
- 申请人： ASML Holding N.V.
- 申请人地址： De Run 6501 5504 DR Veldhoven NL
- 专利权人： ASML Holding N.V.
- 当前专利权人： ASML Holding N.V.
- 当前专利权人地址： De Run 6501 5504 DR Veldhoven NL
- 代理机构： Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
- 优先权： US366444 20030214
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H02N15/00 ; G03F9/00
摘要：
A system and method are used to levitate and translate a stage within a chamber using a motor assembly coupled to a balance mass assembly. The balance mass assembly is positioned adjacent the chamber. The motor assembly includes a stator and a coil. One of the stator and the coil are coupled to the stage on a first side of a wall of the chamber. The other of the stator and the coil are coupled to the balance mass assembly on a second side of the wall of the chamber. A magnetic assembly coupled to the stage allows the stage to levitate within the chamber. Once levitated, the stage is translated based on the interaction of the magnets and an energized coil.
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