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    System and method to reduce the effect of reactive forces on a stage using a balance mass
    2.
    发明公开
    System and method to reduce the effect of reactive forces on a stage using a balance mass 审中-公开
    装置和方法，以减少在载体平台上的反作用力，使用平衡质量

    公开(公告)号：EP1447838A2

    公开(公告)日：2004-08-18

    申请号：EP04002962.1

    申请日：2004-02-10

    申请人： ASML Holding N.V.

    发明人： Carter, Frederick Michael ,  Stenabaugh, Donald

    IPC分类号： H01L21/00 ,  H02N15/00 ,  G03F9/00

    CPC分类号： G03F7/70766 ,  G03F7/70758 ,  H01L21/677 ,  H02K41/03 ,  H02N15/00

    摘要： A system and method are used to levitate and translate a stage within a chamber using a motor assembly coupled to a balance mass assembly. The balance mass assembly is positioned adjacent the chamber. The motor assembly includes a stator and a coil. One of the stator and the coil are coupled to the stage on a first side of a wall of the chamber. The other of the stator and the coil are coupled to the balance mass assembly on a second side of the wall of the chamber. A magnetic assembly coupled to the stage allows the stage to levitate within the chamber. Once levitated, the stage is translated based on the interaction of the magnets and an energized coil.

    摘要翻译： 一种系统和方法被用于悬浮并使用耦合到平衡质量组件的电机组件的腔室内平移的阶段。 平衡块组件靠近室。 马达组件包括定子和线圈。 一个定子和线圈的耦合到舞台上的腔室的壁的第一侧。 其他定子和线圈都耦合到所述平衡物组件上腔室的所述壁的第二侧。 耦合到台的磁性组件允许该阶段在腔室内悬浮。 一旦悬浮，舞台是基于通电线圈的磁体的相互作用和翻译。