发明授权
EP1451848B1 DEVICE AND METHOD FOR REDUCING THE IMPACT OF DISTORTIONS IN A MICROSCOPE
有权
设备和方法减少失真的影响，在显微镜
- 专利标题： DEVICE AND METHOD FOR REDUCING THE IMPACT OF DISTORTIONS IN A MICROSCOPE
- 专利标题（中）： 设备和方法减少失真的影响，在显微镜
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申请号： EP02746290.2申请日： 2002-07-12
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公开(公告)号： EP1451848B1公开(公告)日： 2009-12-02
- 发明人: OLIN, Håkan , SVENSSON, Krister , ALTHOFF, Fredrik , DANILOV, Andrey , BENGTSSON, Paul , HOSPERS, Martin
- 申请人： Nanofactory Instruments AB
- 申请人地址： Stena Center 1B 412 92 Göteborg SE
- 专利权人： Nanofactory Instruments AB
- 当前专利权人： Nanofactory Instruments AB
- 当前专利权人地址： Stena Center 1B 412 92 Göteborg SE
- 代理机构： Westman, Per Börje Ingemar
- 优先权： SE0102498 20010713; SE0103782 20011112; SE0103779 20011112
- 国际公布： WO2003007328 20030123
- 主分类号： H01J37/20
- IPC分类号： H01J37/20
摘要：
This invention relates to a device for reducing the impact of undesired distortions when studying a sample (1) in an electron microscope (3), wherein said sample (1) is arranged to be mounted on a micro-positioning device (2), characterised in that said micro-positioning device (2) is connected with a control device (4), being arranged to control said micro-positioning device (4) so as to compensate for measurement errors due to undesired distortions.
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