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公开(公告)号：EP1340112A1
公开(公告)日：2003-09-03
申请号：EP01999851.7
申请日：2001-12-03
发明人： OLIN, Hakan , ALTHOFF, Fredrik , SVENSSON, Krister
CPC分类号： G02B21/32 , G01Q10/04 , H01J2237/20264 , H02N2/0095 , H02N2/025
摘要： This invention relates to a device for micropositioning of an object (4), e.g. for use in a microscope. The device comprises an acceleration unit (1) and an intermediate part (3), connecting said acceleration unit (1) with said object (4). The position of the object relative to the acceleration unit (1) is variable at high acceleration or retardation of said acceleration unit (1), owing to mechanical inertia of the object (4). Further, the intermediate part (3) has a first end (3'), being attached to said acceleration unit (1), and a second end (3'), being provided with an essentially circumferential contact surface (3a), and the object (4) is provided with clamping elements (4'). These clamping elements (4') are adapted to clamp around said contact surface (3a) of said intermediate part (3) in order to hold the object (4) in relation to the intermediate part (3) merely by the clamping force and the frictional force exerted by said clamping elements (4') upon said contact surface (3a).
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公开(公告)号：EP2215637A1
公开(公告)日：2010-08-11
申请号：EP08853364.1
申请日：2008-12-01
发明人： SVENSSON, Krister , BENGTSSON, Paul
CPC分类号： G01Q10/065 , G01Q30/04
摘要： A method, system, device, and software for automatically determining Pl feedback parameters in a scanning probe microscopy application setup using an iterative feedback tuning process.
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公开(公告)号：EP1451848A1
公开(公告)日：2004-09-01
申请号：EP02746290.2
申请日：2002-07-12
发明人： OLIN, H kan , SVENSSON, Krister , ALTHOFF, Fredrik , DANILOV, Andrey , BENGTSSON, Paul , HOSPERS, Martin
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , Y10S977/872
摘要： This invention relates to a device for reducing the impact of undesired distortions when studying a sample (1) in an electron microscope (3), wherein said sample (1) is arranged to be mounted on a micro-positioning device (2), characterised in that said micro-positioning device (2) is connected with a control device (4), being arranged to control said micro-positioning device (4) so as to compensate for measurement errors due to undesired distortions.
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4.发明授权
公开(公告)号：EP1451848B1
公开(公告)日：2009-12-02
申请号：EP02746290.2
申请日：2002-07-12
发明人： OLIN, Håkan , SVENSSON, Krister , ALTHOFF, Fredrik , DANILOV, Andrey , BENGTSSON, Paul , HOSPERS, Martin
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , Y10S977/872
摘要： This invention relates to a device for reducing the impact of undesired distortions when studying a sample (1) in an electron microscope (3), wherein said sample (1) is arranged to be mounted on a micro-positioning device (2), characterised in that said micro-positioning device (2) is connected with a control device (4), being arranged to control said micro-positioning device (4) so as to compensate for measurement errors due to undesired distortions.
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公开(公告)号：EP1989742A1
公开(公告)日：2008-11-12
申请号：EP07709399.5
申请日：2007-03-02
CPC分类号： G01Q10/04 , H01J2237/20221 , H01J2237/20264 , H01J2237/26 , H02N2/025 , H02N2/067
摘要： The present invention relates to an inertial slider (10) and a method for safely and controllably approach an object (2) towards a fixed object (3) for instance inside a transmission electron microscope (101). The inertial slider is controlled with a control signal (201) with a timing characteristic faster than a mechanical resonance of the object to be moved. The inertial slider moves in a first step away from the fixed object and the movable object is moved relative the inertial slider in that first step.
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公开(公告)号：EP1340112B1
公开(公告)日：2008-02-06
申请号：EP01999851.7
申请日：2001-12-03
发明人： OLIN, Hakan , ALTHOFF, Fredrik , SVENSSON, Krister
CPC分类号： G02B21/32 , G01Q10/04 , H01J2237/20264 , H02N2/0095 , H02N2/025
摘要： This invention relates to a device for micropositioning of an object (4), e.g. for use in a microscope. The device comprises an acceleration unit (1) and an intermediate part (3), connecting said acceleration unit (1) with said object (4). The position of the object relative to the acceleration unit (1) is variable at high acceleration or retardation of said acceleration unit (1), owing to mechanical inertia of the object (4). Further, the intermediate part (3) has a first end (3'), being attached to said acceleration unit (1), and a second end (3'), being provided with an essentially circumferential contact surface (3a), and the object (4) is provided with clamping elements (4'). These clamping elements (4') are adapted to clamp around said contact surface (3a) of said intermediate part (3) in order to hold the object (4) in relation to the intermediate part (3) merely by the clamping force and the frictional force exerted by said clamping elements (4') upon said contact surface (3a).
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公开(公告)号：EP1454335A1
公开(公告)日：2004-09-08
申请号：EP02786322.4
申请日：2002-11-12
CPC分类号： G01Q30/02 , G01Q20/02 , G01Q20/04 , G01Q60/366 , H01J37/20 , H01J37/26 , H01J2237/2583
摘要： This invention relates to a measurement device (1) for use in an electron microscope (2), the device comprising a sample holder (3), for holding a sample (4) to be studied, and an indentation tip (5), being arranged in proximity of said sample holder (3), whereby an interaction between said sample and said tip is arranged to be measured. The measurement device comprises a force sensor (6), being positioned in proximity with an interaction area of said sample (4) and said tip (5), and being arranged to directly measure a force resulting from interaction between said sample (4) and said tip (5).
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