发明公开
EP1471340A4 VIBRATING TYPE PRESSURE SENSOR 有权
振动型压力传感器

VIBRATING TYPE PRESSURE SENSOR
摘要:
A high-sensitive and high-accuracy vibrating type pressure sensor 1 allowing a corrosive gas pressure to be directly applied thereto, having a heat resistance, and having no room for mixing of noise into a vibrator, comprising a stainless steel pressure receiving diaphragm 4 for receiving a fluid pressure P on a rear surface side, the vibrator 12 formed on the front surface side of the pressure receiving diaphragm 4, a wall body 8 disposed so as to surround the periphery of the vibrator 12, and a permeable part 20 for light transmission for changing an internal space in which the vibrator 12 is present into a vacuum chamber 10 by closing an opening part 8a in the wall body 8, whereby, since the diaphragm 4 is formed of the stainless steel with corrosion resistance, the sensor can also be applied to corrosive fluid, since circuit wiring is eliminated from the vibrator 12 and the vibrator is isolatedly disposed in the vacuum chamber 10, mixing of electromagnetic noise can be eliminated, and since the resonance frequency fn of the vibrator 12 is performed by optical measurement in the state of non-contact, extremely high-sensitive and high-accuracy detection can be performed. A forced vibration means 57 can also be operated by piezo driving and electrostatic driving from the outside without generating noise.
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