发明公开
- 专利标题: VIBRATING TYPE PRESSURE SENSOR
- 专利标题(中): 振动型压力传感器
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申请号: EP03701810申请日: 2003-01-20
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公开(公告)号: EP1471340A4公开(公告)日: 2006-09-06
- 发明人: ESASHI MASAYOSHI , HIRATA KAORU
- 申请人: FUJIKIN KK , ESASHI MASAYOSHI
- 专利权人: FUJIKIN KK,ESASHI MASAYOSHI
- 当前专利权人: FUJIKIN KK,ESASHI MASAYOSHI
- 优先权: JP2002011528 2002-01-21
- 主分类号: G01L9/00
- IPC分类号: G01L9/00
摘要:
A high-sensitive and high-accuracy vibrating type pressure sensor 1 allowing a corrosive gas pressure to be directly applied thereto, having a heat resistance, and having no room for mixing of noise into a vibrator, comprising a stainless steel pressure receiving diaphragm 4 for receiving a fluid pressure P on a rear surface side, the vibrator 12 formed on the front surface side of the pressure receiving diaphragm 4, a wall body 8 disposed so as to surround the periphery of the vibrator 12, and a permeable part 20 for light transmission for changing an internal space in which the vibrator 12 is present into a vacuum chamber 10 by closing an opening part 8a in the wall body 8, whereby, since the diaphragm 4 is formed of the stainless steel with corrosion resistance, the sensor can also be applied to corrosive fluid, since circuit wiring is eliminated from the vibrator 12 and the vibrator is isolatedly disposed in the vacuum chamber 10, mixing of electromagnetic noise can be eliminated, and since the resonance frequency fn of the vibrator 12 is performed by optical measurement in the state of non-contact, extremely high-sensitive and high-accuracy detection can be performed. A forced vibration means 57 can also be operated by piezo driving and electrostatic driving from the outside without generating noise.
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