发明公开
- 专利标题： SAMPLE SURFACE INSPECTION APPARATUS AND METHOD
- 专利标题（中）： 样品表面检查装置及方法
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申请号： EP03720920申请日： 2003-04-17
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公开(公告)号： EP1495312A4公开(公告)日： 2008-12-17
- 发明人: HATAKEYAMA MASAHIRO , WATANABE KENJI , MURAKAMI TAKESHI , SATAKE TOHRU , NOJI NOBUHARU
- 申请人： EBARA CORP
- 专利权人： EBARA CORP
- 当前专利权人： EBARA CORP
- 优先权： JP2002114756 2002-04-17; JP2002129515 2002-05-01
- 主分类号： G01N23/225
- IPC分类号： G01N23/225 ; G03F7/16 ; H01L21/66 ; G01N23/227 ; H01J37/28
摘要：
The present invention provides a surface inspection method and apparatus for inspecting a surface of a sample, in which a resistive film is coated on the surface, and a beam is irradiated to the surface having the resistive film coated thereon, to thereby conduct inspection of the surface of the sample. In the surface inspection method of the present invention, a resistive film having an arbitrarily determined thickness t1 is first coated on a surface of a sample. Thereafter, a part of the resistive film having the arbitrarily determined thickness t1 is dissolved in a solvent, to thereby reduce the thickness of the resistive film to a desired level. This enables precise control of a value of resistance of the resistive film and suppresses distortion of an image to be detected.
信息查询
