发明授权
- 专利标题: VORRICHTUNG AUF BASIS VON PARTIELL OXIDIERTEM PORÖSEN SILIZIUM UND VERFAHREN ZU DEREN HERSTELLUNG
- 专利标题(英): Device based on partially oxidized porous silicon and method for the production thereof
- 专利标题(中): 基于装置的部分氧化FOR多孔硅和方法及其
-
申请号: EP03720392.4申请日: 2003-03-28
-
公开(公告)号: EP1497030B1公开(公告)日: 2006-09-13
- 发明人: DERTINGER, Stephan , FRITZ, Michaela , FUCHS, Karin , HANEDER, Thomas , LEHMANN, Volker , MARTIN, Alfred , MÄRZ, Reinhard
- 申请人: Infineon Technologies AG
- 申请人地址: St.-Martin-Strasse 53 81669 München DE
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: St.-Martin-Strasse 53 81669 München DE
- 代理机构: Müller-Boré & Partner Patentanwälte
- 优先权: DE10217569 20020419
- 国际公布: WO2003089925 20031030
- 主分类号: B01L3/00
- IPC分类号: B01L3/00
摘要:
The invention relates to a device comprising a planar macroporous support material based on silicon, which has a plurality of pores with a diameter ranging from 500 nm to 100 µm, distributed over at least one surface region, said pores extending in a continuous manner from one surface to the opposite surface of the support material. Said device comprises at least one region containing one or several pores with pore walls consisting of Si02, said region being surrounded by a frame that is arranged substantially parallel to the longitudinal axes of the pores, is open in the direction of the surface of the support material and consists of walls with a silicon core. The silicon core changes to silicon dioxide over the cross-section towards the exterior face of the walls that form the frame. The invention also relates to a method for producing said device. The inventive device is suitable for use as a base for a biochip base module in methods for detecting biochemical (bonding) reactions, in addition to analysing for this purpose enzymatic reactions, nucleic acid hybridizations, protein-protein interactions and other bonding reactions in the domain of genome, proteome or active substance research in the fields of biology and medicine.
公开/授权文献
信息查询
IPC分类: