发明授权
EP1497030B1 VORRICHTUNG AUF BASIS VON PARTIELL OXIDIERTEM PORÖSEN SILIZIUM UND VERFAHREN ZU DEREN HERSTELLUNG 有权
基于装置的部分氧化FOR多孔硅和方法及其

VORRICHTUNG AUF BASIS VON PARTIELL OXIDIERTEM PORÖSEN SILIZIUM UND VERFAHREN ZU DEREN HERSTELLUNG
摘要:
The invention relates to a device comprising a planar macroporous support material based on silicon, which has a plurality of pores with a diameter ranging from 500 nm to 100 µm, distributed over at least one surface region, said pores extending in a continuous manner from one surface to the opposite surface of the support material. Said device comprises at least one region containing one or several pores with pore walls consisting of Si02, said region being surrounded by a frame that is arranged substantially parallel to the longitudinal axes of the pores, is open in the direction of the surface of the support material and consists of walls with a silicon core. The silicon core changes to silicon dioxide over the cross-section towards the exterior face of the walls that form the frame. The invention also relates to a method for producing said device. The inventive device is suitable for use as a base for a biochip base module in methods for detecting biochemical (bonding) reactions, in addition to analysing for this purpose enzymatic reactions, nucleic acid hybridizations, protein-protein interactions and other bonding reactions in the domain of genome, proteome or active substance research in the fields of biology and medicine.
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