发明公开
- 专利标题: METHOD OF CUTTING PROCESSED OBJECT
- 专利标题(中): 方法用于切割已编辑点
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申请号: EP03744054申请日: 2003-03-11
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公开(公告)号: EP1498216A4公开(公告)日: 2009-07-01
- 发明人: FUKUYO FUMITSUGU , FUKUMITSU KENSHI
- 申请人: HAMAMATSU PHOTONICS KK
- 专利权人: HAMAMATSU PHOTONICS KK
- 当前专利权人: HAMAMATSU PHOTONICS KK
- 优先权: JP2002067372 2002-03-12
- 主分类号: B23K26/38
- IPC分类号: B23K26/38 ; B28D1/22 ; B28D5/00 ; C03B33/02 ; C03B33/033 ; C03B33/07 ; H01L21/301
摘要:
A method of cutting a processed object capable of accurately cutting a processed object, comprising the steps of radiating laser beam (L) to the inside of the processed object (1) such as a silicon wafer with a condensing point (P) focused thereto to form reformed areas (7) in the processed object (1) by absorbing multiple photons, forming cut start areas (8) eccentric from the centerline (CL) of the processed object (1) in thickness direction to the surface (3) side of the processed object (1) along a predicted cut line, and pressing the processed object (1) from the rear (21) side thereof, whereby the processed object (1) can be accurately cut along the predicted cut line by producing cracking starting at the cut start areas (8).
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IPC分类: