Invention Publication
EP1530291A2 Piezoelectric resonator, production method thereof, filter, duplexer, and communication device
审中-公开
Piezoelektrischer谐振器,压电滤波器,双工器,Kommunikationsgerätund Herstellungsverfahren des piezoelektrischen谐振器
- Patent Title: Piezoelectric resonator, production method thereof, filter, duplexer, and communication device
- Patent Title (中): Piezoelektrischer谐振器,压电滤波器,双工器,Kommunikationsgerätund Herstellungsverfahren des piezoelektrischen谐振器
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Application No.: EP04026193.5Application Date: 2004-11-04
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Publication No.: EP1530291A2Publication Date: 2005-05-11
- Inventor: Yamaguchi, Hiroshi , Nakatsuka, Hiroshi , Onishi, Keiji , Yamakawa, Takehiko , Nakamura, Hiroyuki
- Applicant: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- Applicant Address: 1006, Oaza-Kadoma Kadoma-shi, Osaka 571-8501 JP
- Assignee: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- Current Assignee: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- Current Assignee Address: 1006, Oaza-Kadoma Kadoma-shi, Osaka 571-8501 JP
- Agency: Gassner, Wolfgang, Dr.
- Priority: JP2003378257 20031107
- Main IPC: H03H9/17
- IPC: H03H9/17
Abstract:
The present invention relates to a piezoelectric resonator including: a substrate; a lower electrode (103) provided on or above the substrate; a piezoelectric member (101) provided on or above the lower electrode; an upper electrode (102) provided on or above the piezoelectric member; and a cavity (104) provided below a vibration member consisting of the lower electrode, the piezoelectric member, and the upper electrode. In the case where a resonance frequency of vibration with a thickness of the vibration member being a half of a wavelength is taken as fr1, an average of ultrasonic velocity in a material forming the cavity is taken as Vc2, and a value determined based on the resonance frequency fr1 and the average of ultrasonic velocity Vc2 is λc (=Vc2/fr1), a depth t2 of the cavity is set as shown below, (2n-1) × λc 4 - λc 8 ≦ t 2 ≦ (2n-1) × λc 4 + λc 8 , where n is an arbitrary natural number.
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