利索-全球专利检索

  1. 登录
  2. 注册
发明公开
EP1530291A2 Piezoelectric resonator, production method thereof, filter, duplexer, and communication device 审中-公开
Piezoelektrischer谐振器，压电滤波器，双工器，Kommunikationsgerätund Herstellungsverfahren des piezoelektrischen谐振器

Piezoelectric resonator, production method thereof, filter, duplexer, and communication device
摘要：
The present invention relates to a piezoelectric resonator including: a substrate; a lower electrode (103) provided on or above the substrate; a piezoelectric member (101) provided on or above the lower electrode; an upper electrode (102) provided on or above the piezoelectric member; and a cavity (104) provided below a vibration member consisting of the lower electrode, the piezoelectric member, and the upper electrode. In the case where a resonance frequency of vibration with a thickness of the vibration member being a half of a wavelength is taken as fr1, an average of ultrasonic velocity in a material forming the cavity is taken as Vc2, and a value determined based on the resonance frequency fr1 and the average of ultrasonic velocity Vc2 is λc (=Vc2/fr1), a depth t2 of the cavity is set as shown below, (2n-1) × λc 4 - λc 8 ≦ t 2 ≦ (2n-1) × λc 4 + λc 8 , where n is an arbitrary natural number.
摘要（中）：

压电谐振器技术领域本发明涉及一种压电谐振器，包括：基板; 设置在所述基板上或上方的下电极（103） 设置在所述下电极上或上方的压电体（101） 设置在压电元件上或上方的上电极（102） 以及设置在由下电极，压电部件和上电极构成的振动部件的下方的空腔（104）。 在将振动部件的厚度为波长的一半的振动的共振频率作为fr1的情况下，将形成空腔的材料的超声波速度的平均值作为Vc2，将基于 谐振频率fr1和超声速度Vc2的平均值为λc（= Vc2 / fr1），空腔的深度t2如下所示设置：（2n-1）×λc DIVIDED 4-λc DIVIDED 8

信息查询
Global Dossier Espacenet
0/0