Abstract:
A low loss, small scale piezoelectric transformer, suited for a cold cathode tube load, and having a high effective coupling factor, is provided using a piezoelectric plate having a single polarization direction. Controlling the dimensions of the third electrode portion 15a constituting the high impedance portion makes it possible easily to adjust the capacitance of the electrostatic capacitor formed between the first electrode portion 12 and the third electrode portion in accordance with the load. Also, the second electrode portion 13 and the fourth electrode portion 15b constituting the low impedance portion are substantially equal in area and the third electrode portion and the fourth electrode portion are formed in one piece, so that energy propagation efficiency can be increased. Consequently, the effective coupling factor resulting from the electrode structure and the vibration mode can be kept high even if the capacitance is changed freely, and thus high element efficiency and a small amount of generated heat can be maintained and stress can be decreased.
Abstract:
A series piezoelectric resonator (11) is connected in series between an input terminal (15a) and an output terminal (15b). A first electrode of a first parallel piezoelectric resonator (12a) is connected to a connection point between the input terminal (15a) and the series piezoelectric resonator (11), and a second electrode of the first parallel piezoelectric resonator (12a) is connected to a first terminal of a first inductor (13a). A first electrode of a a second parallel piezoelectric resonator (12b) is connected to a connection point between the series piezoelectric resonator (11) and the output terminal (15b), and a second electrode of the second parallel piezoelectric resonator (12b) is connected to a first terminal of a second inductor (13b). Second terminals of the inductors (13a,13b) are grounded. An additional piezoelectric resonator (14) is connected between the second electrode of the first parallel piezoelectric resonator (12a) and the second electrode of the second parallel piezoelectric resonator (12b).
Abstract:
The present invention relates to a drive device for one or more series-connected cold cathode fluorescent lamps having an electrical terminal at each end. The drive device has a piezoelectric transformer for converting by means of the piezoelectric effect a primary ac input applied to primary electrodes to a secondary ac output, which is removed from secondary electrodes; a drive arrangement for applying the primary ac input to the primary electrodes; and a brightness control circuit for controlling brightness. The brightness control circuit detects the phase difference between the secondary ac output and the primary ac input. When the detected phase difference is greater than a specified phase difference, the drive arrangement reduces the power of the primary ac input applied to the primary electrodes. If the detected phase difference is less than the specified phase difference, the drive arrangement increases the power of the primary ac input applied to the primary electrodes.
Abstract:
The present invention relates to a piezoelectric resonator including: a substrate; a lower electrode (103) provided on or above the substrate; a piezoelectric member (101) provided on or above the lower electrode; an upper electrode (102) provided on or above the piezoelectric member; and a cavity (104) provided below a vibration member consisting of the lower electrode, the piezoelectric member, and the upper electrode. In the case where a resonance frequency of vibration with a thickness of the vibration member being a half of a wavelength is taken as fr1, an average of ultrasonic velocity in a material forming the cavity is taken as Vc2, and a value determined based on the resonance frequency fr1 and the average of ultrasonic velocity Vc2 is λc (=Vc2/fr1), a depth t2 of the cavity is set as shown below, (2n-1) × λc 4 - λc 8 ≦ t 2 ≦ (2n-1) × λc 4 + λc 8 , where n is an arbitrary natural number.
Abstract:
A thin film bulk acoustic resonator includes a piezoelectric film, and a pair of electrodes between which the piezoelectric film is interposed. The piezoelectric film includes an outer region extending outwards from at least a portion of the periphery of a resonator portion composed of the pair of electrodes and the piezoelectric film. The outer region includes, in at least a portion thereof, an acoustic damping region for damping acoustic waves.
Abstract:
A piezoelectric element of the present invention includes a substrate (21), a lower electrode layer (24), a piezoelectric layer (22), an upper electrode layer (23), a cavity portion (25) formed below a piezoelectric vibrating portion (1), and at least two bridging portions (2a,2b). The at least two bridging portions (2a,2b) are formed so as not to be line-symmetric with respect to any line segment traversing the piezoelectric vibrating portion (1) and/or so as not to be point-symmetric with respect to any point in the piezoelectric vibrating portion (1) in a projection of the piezoelectric vibrating portion (1) in the laminating direction.
Abstract:
A piezoeletric resonator includes: a substrate (105); a lower electrode (103) formed on or above the substrate; a piezoeletric body (101) formed on or above the lower electrode; an upper electrode (102) formed on or above the piezoeletric body; and a cavity (104) under a vibrating portion formed by the lower electrode, the piezoeletric body, and the upper electrode. Where a resonant frequency of vibration with a thickness of the vibrating portion being a half of a wavelength is taken as fr, an average of ultrasonic velocity in a material forming the cavity is taken as Vc, and a value determined based on the resonant frequency fr and the average of ultrasonic velocity Vc is taken as λc (=Vc/fr), a depth of the cavity is set so as to be equal to or larger than n×λc/2-λc/8 and equal to or smaller than n×λc/2+λc/8.
Abstract:
A piezoelectric device (100) includes first and second piezoeletric resonators (110, 120). The first piezoeletric resonator (110) has a structure in which a cavity (111), a lower electrode (112), apiezoeletric layer (113), and an upper electrode (114) are formed on a substrate (101). The second piezoeletric resonator (120) has a structure in which a cavity (121), a lower electrode (122), a piezoeletric layer (123), and an upper electrode (124) are formed on the substrate (101). A feature of the above-structure piezoelectric device (100) is that the piezoeletric layers (113, 123) have the same film thickness and the depth (t1) of the cavity (111) of the first piezoeletric resonator (110) is different from the depth (t2) of the cavity (121) of the second piezoeletric resonator (120).
Abstract:
A piezoelectric resonator of the present invention is structured such that on a substrate (5) having a cavity (4) formed therein, a lower electrode (3), a piezoelectric body (1), a spurious component control layer (16) , and an upper electrode (2) are formed in this order frombottomup. The spurious component control layer (16) is a layer for controlling a spurious frequency, and composed of, for example, a metallic material, a dielectric material, or a piezoelectric material. By additionally providing the spurious component control layer (16), it is made possible to cause variation of the spurious frequency due to unwanted variation to become greater than variation in resonance frequency of the main resonance of the piezoelectric resonator. Thus, it is possible to realize a piezoelectric resonator having an admittance frequency response where no spurious component occurs between resonance frequency fr and antiresonance frequency fa.