Invention Publication
EP1530292A2 Piezoelectric resonator, method of manufacturing piezoelectric resonator, and filter, duplexer, and communication device using piezolectric resonator
审中-公开
使用的压电谐振器是Herstellungsvefahren,以及滤波器,双工器和通信装置,所述压电谐振器
- Patent Title: Piezoelectric resonator, method of manufacturing piezoelectric resonator, and filter, duplexer, and communication device using piezolectric resonator
- Patent Title (中): 使用的压电谐振器是Herstellungsvefahren,以及滤波器,双工器和通信装置,所述压电谐振器
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Application No.: EP04026163.8Application Date: 2004-11-04
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Publication No.: EP1530292A2Publication Date: 2005-05-11
- Inventor: Nakatsuka, Hiroshi , Onishi, Keiji , Nakamura, Hiroyuki , Yamakawa, Takehiko , Yamaguchi, Hiroshi
- Applicant: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- Applicant Address: 1006, Oaza-Kadoma Kadoma-shi, Osaka 571-8501 JP
- Assignee: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- Current Assignee: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- Current Assignee Address: 1006, Oaza-Kadoma Kadoma-shi, Osaka 571-8501 JP
- Agency: Gassner, Wolfgang, Dr.
- Priority: JP2003378260 20031107
- Main IPC: H03H9/56
- IPC: H03H9/56
Abstract:
A piezoeletric resonator includes: a substrate (105); a lower electrode (103) formed on or above the substrate; a piezoeletric body (101) formed on or above the lower electrode; an upper electrode (102) formed on or above the piezoeletric body; and a cavity (104) under a vibrating portion formed by the lower electrode, the piezoeletric body, and the upper electrode. Where a resonant frequency of vibration with a thickness of the vibrating portion being a half of a wavelength is taken as fr, an average of ultrasonic velocity in a material forming the cavity is taken as Vc, and a value determined based on the resonant frequency fr and the average of ultrasonic velocity Vc is taken as λc (=Vc/fr), a depth of the cavity is set so as to be equal to or larger than n×λc/2-λc/8 and equal to or smaller than n×λc/2+λc/8.
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