发明公开
- 专利标题: OBJECTIVE WITH BIREFRINGENT LENSES
- 专利标题(中): 带双断路镜头镜头
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申请号: EP02807753.5申请日: 2002-12-20
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公开(公告)号: EP1535100A1公开(公告)日: 2005-06-01
- 发明人: TOTZECK, Michael , KAMENOV, Vladimir , KRÄHMER, Daniel , ULRICH, Wilhelm
- 申请人: Carl Zeiss SMT AG
- 申请人地址: Carl-Zeiss-Strasse 22 73447 Oberkochen DE
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: Carl-Zeiss-Strasse 22 73447 Oberkochen DE
- 代理机构: Schultz, Jörg Martin, Dipl.-Phys.
- 优先权: DE10241102 20020903; DE10253353 20021114
- 国际公布: WO2004023184 20040318
- 主分类号: G02B13/14
- IPC分类号: G02B13/14 ; G02B5/30 ; G03F7/20
摘要:
Objective (1, 601), in particular a projection objective for a microlithography projection apparatus, with first birefringent lenses (L108, L109, L129, L130) and with second birefringent lenses (L101-L107, L110-L128). The first lenses (L108, L109, L129, L130) are distinguished from the second lenses (L101-L107, L110-L128) by the lens material used or by the material orientation. After passing through the first lenses (L108, L109, L129, L130) and the second lenses (L101-L107, L110-L128), outer aperture ray (5, 7) and a principal ray (9) are subject to optical path differences for two mutually orthogonal states of polarization. The difference between these optical path differences is smaller than 25% of the working wavelength. In at least one first lens (L129, L130), the aperture angle of the outer aperture ray (5, 7) is at least 70% of the largest aperture angle occurring for said aperture ray in all of the first lenses (L108, L109, L129, L130) and second lenses (L101-L107, L110-L128). This arrangement has the result that the first lenses (L108, L109, L129, L130) have a combined material volume of no more than 20% of the combined total material volume of the first lenses (L108, L109, L129, L130) and second lenses (L101-L07, L110-L128).
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