发明公开
EP1555535A1 POTENTIAL FIXING DEVICE, POTENTIAL FIXING METHOD, AND CAPACITANCE MEARUING INSTRUMENT
审中-公开
可能的固定装置,可能的固定方法以及电容测量仪器
- 专利标题: POTENTIAL FIXING DEVICE, POTENTIAL FIXING METHOD, AND CAPACITANCE MEARUING INSTRUMENT
- 专利标题(中): 可能的固定装置,可能的固定方法以及电容测量仪器
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申请号: EP02777897.6申请日: 2002-10-22
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公开(公告)号: EP1555535A1公开(公告)日: 2005-07-20
- 发明人: YAKABE, Masami c/o Tokyo Electron Limited , NAKANO, Koichi
- 申请人: Tokyo Electron Limited , Hokuto Electronics, Inc.
- 申请人地址: 3-6, Akasaka 5-chome Minato-ku, Tokyo 107-8481 JP
- 专利权人: Tokyo Electron Limited,Hokuto Electronics, Inc.
- 当前专利权人: Tokyo Electron Limited,Hokuto Electronics, Inc.
- 当前专利权人地址: 3-6, Akasaka 5-chome Minato-ku, Tokyo 107-8481 JP
- 代理机构: Liesegang, Eva
- 国际公布: WO2004038434 20040506
- 主分类号: G01R27/26
- IPC分类号: G01R27/26 ; G01D5/24 ; G01N27/22 ; H04R3/06
摘要:
An electric potential fixing apparatus is provided that can prevent the combined total amount of electricity of a connection line between the first capacitance and the second capacitance from changing even when the electric potential of the connection line between the first capacitance and the second capacitance is fixed in the case where the first capacitance and the second capacitance are directly connected.
This electric potential fixing apparatus has the first high resistance (3) and the second high resistance (4) and includes a voltage supply circuit (1) that preserves the combined total amount of electric charge of a measuring capacitance (14) and a fixed capacitance (15) and maintains constant the electric potential of a signal line (17) that connects the measuring capacitance (14) and the fixed capacitance (15). And an output terminal (5) of the voltage supply circuit (1) is connected to the signal line (17).
This electric potential fixing apparatus has the first high resistance (3) and the second high resistance (4) and includes a voltage supply circuit (1) that preserves the combined total amount of electric charge of a measuring capacitance (14) and a fixed capacitance (15) and maintains constant the electric potential of a signal line (17) that connects the measuring capacitance (14) and the fixed capacitance (15). And an output terminal (5) of the voltage supply circuit (1) is connected to the signal line (17).
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