发明公开
EP1556395A4 METHODS FOR MAKING METALLOCENE COMPOUNDS
审中-公开
VERFAHREN ZUR HERSTELLUNG冯METALLOCENVERBINDUNGEN
- 专利标题: METHODS FOR MAKING METALLOCENE COMPOUNDS
- 专利标题(中): VERFAHREN ZUR HERSTELLUNG冯METALLOCENVERBINDUNGEN
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申请号: EP03810820申请日: 2003-10-30
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公开(公告)号: EP1556395A4公开(公告)日: 2008-02-20
- 发明人: THOMPSON DAVID M , HOOVER CYNTHIA A
- 申请人: PRAXAIR TECHNOLOGY INC
- 专利权人: PRAXAIR TECHNOLOGY INC
- 当前专利权人: PRAXAIR TECHNOLOGY INC
- 优先权: US42294602 2002-10-31; US42294702 2002-10-31; US42628402 2002-11-14; US42746102 2002-11-18; US44632003 2003-02-07; US45371803 2003-04-18; US45371903 2003-04-18; US45371703 2003-04-18; US68577703 2003-10-16; US68578503 2003-10-16; US68625403 2003-10-16
- 主分类号: C07F17/02
- IPC分类号: C07F17/02 ; C23C16/18 ; C23C16/40 ; C23C16/455 ; C23C16/00
摘要:
A method for producing Group 8 (VIII) metallocene or metallocene-like compounds employs a compound that includes a Cp' anion, such as found, together with a counterion, in a cyclopentadienide or cyclopentadienide-like salt. In one embodiment, the method includes reacting a metal salt, a (Cp) compound, such as a substituted or unsubstituted cyclopentadiene or indene, and a ligand (L) to form an intermediate compound and reacting the intermediate compound with a Cp' compound, eg., a cyclopentadienide or cyclopentadienide-like salt, where the metal salt can be is a ruthenium, an osmium or an iron halide or nitrate and L is an electron pair donor. Unsubstituted, mono-substituted as well as symmetrically or asymmetrically di- or multi-substituted metallocenes or metallocene-like compounds can be produced. In another embodiment, unsubstituted or symmetrically substituted metallocenes are formed by reacting MX2(PPh3)m with a Cp' compound, where m = 3 or 4. The method can be used to form precursors for chemical vapor deposition of thin films.
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