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EP1568657A2 Method of manufacturing nanostructure arrays 审中-公开
Verfahren zur Herstellung einer Anordnung von Nanostrukturen

Method of manufacturing nanostructure arrays
摘要:
A method of disposing a plurality of isolated particles of a first material onto a substrate comprising the steps of:

(a) depositing a first species onto the substrate;
(b) anodizing the first species to produce a second species;
(c) altering the surface of the second species so that at least one first region of the second species is of greater thickness than at least one second region of the second species;
(d) depositing the first material onto the second species; and
(e) levelling the surface of the first material and the second species.
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