发明公开
- 专利标题： VERFAHREN ZUM HERSTELLEN EINER KONDENSATORANORDNUNG UND KONDENSATORANORDNUNG
- 专利标题（英）： Method for producing a capacitor assembly, and a capacitor assembly
- 专利标题（中）： 用于生产电容器装置和电容器装置
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申请号： EP03782114.7申请日： 2003-11-27
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公开(公告)号： EP1573819A1公开(公告)日： 2005-09-14
- 发明人: BACHMANN, Jens , FÖSTE, Bernd , GOLLER, Klaus , KRIZ, Jakob
- 申请人： Infineon Technologies AG
- 申请人地址： St.-Martin-Strasse 53 81669 München DE
- 专利权人： Infineon Technologies AG
- 当前专利权人： Infineon Technologies AG
- 当前专利权人地址： St.-Martin-Strasse 53 81669 München DE
- 代理机构： Kindermann, Peter
- 优先权： DE10260352 20021220
- 国际公布： WO2004059735 20040715
- 主分类号： H01L27/08
- IPC分类号： H01L27/08
摘要：
The invention relates to, among other things, a method for producing a capacitor assembly (110) containing at least three electrodes (114a, 118a and 122b). The capacitor assembly (110) is produced using a number of lithographic processes that is less than the number of electrodes (114a, 118a and 122b). The invention also relates to a capacitor assembly that extends over more than two or more than three intermediate layers between metallization layers. The circuit arrangement has a high capacitance density and can be produced in a simple manner. The invention additionally relates to a method during which an electrode layer is firstly structured by means of a dry etching process. Remnants of the electrode layer are removed by means of a wet-chemical process. These measures enable the production of capacitors with excellent electrical properties.
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