- 专利标题: AMORPHOUS CARBON FILM AND PROCESS FOR PRODUCING THE SAME
-
申请号: EP03707083.6申请日: 2003-02-26
-
公开(公告)号: EP1598441B1公开(公告)日: 2018-09-26
- 发明人: ODA, Kazuhiko;c/o Itami Works of Sumitomo Electri , UTSUMI, Yoshiharu; c/o Itami Works of Sumitomo Ele , OHARA, Hisanori; c/o Itami Works of Sumitomo Elect
- 申请人: Sumitomo Electric Industries, Ltd.
- 申请人地址: 5-33 Kitahama 4-chome, Chuo-ku Osaka-shi, Osaka 541-0041 JP
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: 5-33 Kitahama 4-chome, Chuo-ku Osaka-shi, Osaka 541-0041 JP
- 代理机构: Boult Wade Tennant LLP
- 国际公布: WO2004076710 20040910
- 主分类号: C23C14/06
- IPC分类号: C23C14/06 ; C23C14/02
摘要:
An amorphous carbon film is provided with a density of 2.8 - 3.3 g/cm . It would be preferable for the film to have: a spin density of 1 x 10 - 1 x 10 spins/cm ; a carbon concentration of at least 99.5 atomic percentage; a hydrogen concentration of no more than 0.5 atomic percentage; an inert gas element concentration of no more than 0.5 atomic percentage; and a Knoop hardness of 3000 - 7000. A mixed layer with a thickness of at least 0.5 nm and no more than 10 nm is formed from a parent material and at least material selected from: B, Al, Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, and W. An amorphous carbon film is disposed on the mixed layer or a metallic intermediate layer formed on the mixed layer, thereby increasing adhesion. This amorphous carbon film is formed with solid carbon using sputtering, cathode-arc ion plating, or laser abrasion.
公开/授权文献
信息查询
IPC分类: