发明授权
EP1611592B1 ADJUSTABLE IMPLANTATION ANGLE WORKPIECE SUPPORT STRUCTURE FOR AN ION BEAM IMPLANTER UTILIZING A LINEAR SCAN MOTOR
有权
具有可调节注入角度离子注入机采用线性扫描引擎工作支持结构
- 专利标题： ADJUSTABLE IMPLANTATION ANGLE WORKPIECE SUPPORT STRUCTURE FOR AN ION BEAM IMPLANTER UTILIZING A LINEAR SCAN MOTOR
- 专利标题（中）： 具有可调节注入角度离子注入机采用线性扫描引擎工作支持结构
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申请号： EP04713445.7申请日： 2004-02-20
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公开(公告)号： EP1611592B1公开(公告)日： 2011-11-16
- 发明人: MITCHELL, Robert
- 申请人： Axcelis Technologies, Inc.
- 申请人地址： 108 Cherry Hill Drive Beverly, MA 01915 US
- 专利权人： Axcelis Technologies, Inc.
- 当前专利权人： Axcelis Technologies, Inc.
- 当前专利权人地址： 108 Cherry Hill Drive Beverly, MA 01915 US
- 代理机构： Treeby, Philip David William
- 优先权： US371606 20030221
- 国际公布： WO2004077480 20040910
- 主分类号： H01J37/20
- IPC分类号： H01J37/20
摘要：
An ion beam implanter includes an ion beam source for generating an ion beam moving along a beam line and a vacuum or implantation chamber wherein a workpiece is positioned to intersect the ion beam for ion implantation of a surface of the workpiece by the ion beam. The ion beam implanter further includes a workpiece support structure coupled to the implantation chamber and supporting the workpiece. The workpiece support structure includes a rotation member rotatably affixed to the implantation chamber. Rotation of the rotation member with respect to the implantation chamber changes an implantation angle of the workpiece with respect to the portion of the ion beam beam line within the implantation chamber. The workpiece support structure further includes a translation member disposed within the implantation chamber, movably coupled to the rotation member and supporting the workpiece for linear movement along a path of travel. The translation member includes a linear motor.
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